High-sensitivity pressure sensor based on graphene with pointed cone structure and manufacturing method thereof

A pressure sensor and high-sensitivity technology, which is applied in the field of high-sensitivity pressure sensors and its preparation, can solve the problems of inconvenient integration of pressure sensors, and achieve the effects of simple method, strong controllability and uniform distribution density

Active Publication Date: 2017-08-29
广州烽鼎医疗科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although graphene materials have also been applied to the preparation of pressure sensors at this stage, they are mainly in the form of centimeter-scale three-dimensional graphene bulk structures (A flexible and high

Method used

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  • High-sensitivity pressure sensor based on graphene with pointed cone structure and manufacturing method thereof
  • High-sensitivity pressure sensor based on graphene with pointed cone structure and manufacturing method thereof
  • High-sensitivity pressure sensor based on graphene with pointed cone structure and manufacturing method thereof

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Effect test

Embodiment 1

[0040] A preparation method based on a high-sensitivity pressure sensor with pointed cone structure graphene, comprising the following steps:

[0041] 1) Transfer two pieces of graphene with a pointed cone structure with a height of about 80 nm on the surface to a flexible PDMS substrate, and then plate a silver electrode with a diameter of 60 μm on one end of the graphene with silver glue.

[0042]2) the AAO with 200nm thickness and 80nm pore size with PMMA support layer is closely attached on the graphene with pointed cone structure on one of the obtained PDMS substrates, then soaked in pure acetone solution for 15min to remove PMMA layer, and obtained graphene and AAO with pointed cone-like structures on PDMS substrates.

[0043] 3) Another piece of graphene with a pointed cone structure on the PDMS substrate is placed face-to-face on the AAO to obtain a high-sensitivity pressure sensor, which has different current responses under different pressure conditions.

[0044] f...

Embodiment 2

[0047] A preparation method based on a high-sensitivity pressure sensor with pointed cone structure graphene, comprising the following steps:

[0048] 1) Transfer two pieces of graphene with a pointed cone structure with a height of about 80 nm on the surface to a flexible PDMS substrate, and then plate a silver electrode with a diameter of 60 μm on one end of the graphene with silver glue.

[0049] 2) AAO with 250nm thickness and 85nm pore size with PMMA support layer is closely attached on the graphene with pointed cone structure on one of the PDMS substrates obtained, then soaked in pure acetone solution for 15min to remove PMMA layer, and obtained graphene and AAO with pointed cone-like structures on PDMS substrates.

[0050] 3) Another piece of graphene with a pointed cone structure on the PDMS substrate is placed face-to-face on the AAO to obtain a high-sensitivity pressure sensor, which has different current responses under different pressure conditions.

[0051] Fig...

Embodiment 3

[0054] A preparation method based on a high-sensitivity pressure sensor with pointed cone structure graphene, comprising the following steps:

[0055] 1) Transfer two pieces of graphene with a pointed cone structure with a height of about 80 nm on the surface to a flexible PDMS substrate, and then plate a silver electrode with a diameter of 60 μm on one end of the graphene with silver glue.

[0056] 2) AAO with 300nm thickness and 85nm aperture with PMMA support layer is closely attached on the graphene with pointed cone structure on one of the PDMS substrates obtained, then soaked in pure acetone solution for 15min to remove PMMA layer, and obtained graphene and AAO with pointed cone-like structures on PDMS substrates.

[0057] 3) Another piece of graphene with a pointed cone structure on the PDMS substrate is placed face-to-face on the AAO to obtain a high-sensitivity pressure sensor, which has different current responses under different pressure conditions.

[0058] Imag...

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Abstract

The invention discloses a high-sensitivity pressure sensor based on graphene with a pointed cone structure. The pressure sensor is a composite structure of graphene whose surface is provided with a pointed cone structure and other insulating and porous two-dimensional materials. First, the insulating and porous two-dimensional materials cover the graphene with a pointed cone structure followed by the plating of electrodes; then, the other graphene with a pointed cone structure after the plating of electrodes is placed onto the insulating and porous two-dimensional materials so as to obtain a sandwich-like pressure sensor. The height, the width and the distribution density of the pointed cone of the graphene are uniform and controllable. The pores of the insulating and porous two-dimensional materials are also distributed in a uniform manner with the pore diameters and depths being controllable. According to the invention, a high-sensitivity pressure sensor with pointed cone graphene comes into being, and a method for conveniently and rapidly manufacturing the sensor in large scale is provided. The method can also be used for new flexible electronic devices such as artificial intelligence, etc.

Description

technical field [0001] The invention relates to a flexible electronic device, the technical field of assembly and application of flexible electronic devices, in particular to a high-sensitivity pressure sensor based on graphene with a pointed cone structure and a preparation method thereof. Background technique [0002] Pressure sensors are one of the most important components used in new flexible electronic devices. High-sensitivity pressure sensors with nanometer-scale ultra-thin thickness are currently a research hotspot for easy integration into wearable and flexible devices. The selection of suitable materials and the design of microstructure are the key to determine the performance of pressure sensors. Because of their good electrical conductivity, one-dimensional materials such as gold, silver, and metal oxide nanowires are currently used as basic materials for pressure sensors, but they are relatively low (generally less than 10kPa) -1 ) sensitivity needs to be imp...

Claims

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Application Information

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IPC IPC(8): G01L1/16G01L9/08
CPCG01L1/16G01L9/08
Inventor 桂许春陈文骏梁秉豪汤子康
Owner 广州烽鼎医疗科技有限公司
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