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Composite surface light-trapping structure and preparation method thereof

A technology of compound curved surface and light trapping structure, which is applied in photovoltaic power generation, final product manufacturing, sustainable manufacturing/processing, etc., can solve the problem of high preparation cost, and achieve the effect of improving the absorption rate and enhancing the absorption rate.

Inactive Publication Date: 2020-01-31
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this structure has limitations. First, it can only be applied to monocrystalline silicon cells. Second, it is usually obtained by deep ultraviolet lithography, so the preparation cost is relatively high.

Method used

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  • Composite surface light-trapping structure and preparation method thereof
  • Composite surface light-trapping structure and preparation method thereof
  • Composite surface light-trapping structure and preparation method thereof

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Experimental program
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Effect test

Embodiment

[0034] In this embodiment, the period of the structure to be prepared is 1 μm, the size of each curved surface in the structure is 500nm*500nm, the height difference between the highest point and the lowest point of the structure is 300nm, and silicon is used as the substrate.

[0035] A layer of AZ6112 resist thin film was evenly coated on the upper surface of the silicon substrate by spin coating method, and after four times of exposure on the resist film, the resist was developed to produce a mask of compound curved surface structure. The light source for making interference fringes in this step is a semiconductor laser with a wavelength of 405nm. The first and second interference directions are perpendicular to each other and the interference angle is 23.4°, and the third and fourth interference directions are perpendicular to each other and the interference angle is . 47.8°, where the first and third interference directions are the same.

[0036] Using the method of plasm...

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Abstract

The invention discloses a compound curved light trapping structure for improving the efficiency of thin-film silicon solar cells. The whole is composed of periodic unit light trapping structures, each unit is composed of a compound curved surface, and a layer of transparent passivation is covered on the unit light trapping structure. membrane. In addition to the outermost curved surface, there are 3 sets of curved surfaces between each curved surface and the 8 closest similar curved surfaces (two in the x direction form a group, two in the y direction form a group, and 4 in the oblique direction These three groups of surfaces are different from each other, and any two adjacent surfaces are smoothly connected to each other at their lowest points to avoid strong reflections at an angle caused by sharp surfaces. As shown in the figure, the surface marked 1 is a group, the surface marked 2 is a group, the surface marked 3 is a group, and the surface marked 4 is a group, and each group of surfaces has the same period and compound together. The structure proposed by the invention is easy to process, and has the characteristics of large angular spectrum range and high spectral absorption, which is conducive to improving the light absorption efficiency of thin film silicon cells.

Description

technical field [0001] The invention relates to the fields of novel clean energy and micro-nano photons, and in particular relates to a compound curved surface light-trapping structure of a solar cell and a preparation method thereof. Background technique [0002] At present, the dominant photovoltaic cell in the market is crystalline silicon cell. It has the advantages of mature technology, stable performance, and high photoelectric conversion efficiency. The efficiency of commercially produced components has exceeded 19%, and the highest efficiency of cells has reached 25.6%. Although the production cost of batteries has dropped significantly after years of efforts, they still exceed the cost of traditional coal power. In order to further reduce the cost, the battery has been developed to the second generation, namely thin-film silicon battery. [0003] Thin-film silicon solar cells have lower conversion efficiency due to greater light loss. At present, adopting a light...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/0216H01L31/068H01L31/18
CPCH01L31/02168H01L31/068H01L31/1868Y02E10/547Y02P70/50
Inventor 郭小伟徐文龙王大帅李绍荣
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA