Composite surface light-trapping structure and preparation method thereof
A technology of compound curved surface and light trapping structure, which is applied in photovoltaic power generation, final product manufacturing, sustainable manufacturing/processing, etc., can solve the problem of high preparation cost, and achieve the effect of improving the absorption rate and enhancing the absorption rate.
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[0034] In this embodiment, the period of the structure to be prepared is 1 μm, the size of each curved surface in the structure is 500nm*500nm, the height difference between the highest point and the lowest point of the structure is 300nm, and silicon is used as the substrate.
[0035] A layer of AZ6112 resist thin film was evenly coated on the upper surface of the silicon substrate by spin coating method, and after four times of exposure on the resist film, the resist was developed to produce a mask of compound curved surface structure. The light source for making interference fringes in this step is a semiconductor laser with a wavelength of 405nm. The first and second interference directions are perpendicular to each other and the interference angle is 23.4°, and the third and fourth interference directions are perpendicular to each other and the interference angle is . 47.8°, where the first and third interference directions are the same.
[0036] Using the method of plasm...
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