Light emitting diode epitaxial wafer and manufacturing method therefor
A technology of light-emitting diodes and manufacturing methods, which is applied in the direction of electrical components, circuits, semiconductor devices, etc., can solve the problems of reducing luminous efficiency, etc., and achieve the effects of improving luminous efficiency, strong blocking effect, and increasing the number of holes
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Embodiment 1
[0036] An embodiment of the present invention provides a light emitting diode epitaxial wafer, see figure 1 , the light-emitting diode epitaxial wafer includes a substrate 1 and a buffer layer 2, an undoped gallium nitride layer 3, an N-type gallium nitride layer 4, a multi-quantum well layer 5, and an electron blocking layer 6 sequentially stacked on the substrate 1 and P-type GaN layer 7 .
[0037] In this example, see figure 2 , the electron blocking layer 6 includes a first sublayer 61, a second sublayer 62, and a third sublayer 63 stacked in sequence, and the first sublayer 61 includes a plurality of first AlGaN layers 61a and a plurality of second AlGaN layers stacked alternately. AlGaN layer 61b, the second sublayer 62 includes a plurality of third AlGaN layers 62a and a plurality of first InGaN layers 62b alternately stacked, and the third sublayer 63 includes alternately stacked GaN layers 63a and The second InGaN layer 63b.
[0038] see Figure 3a , the doping c...
Embodiment 2
[0050] An embodiment of the present invention provides a method for manufacturing a light-emitting diode epitaxial wafer, which is suitable for manufacturing the light-emitting diode epitaxial wafer provided in Embodiment 1, see Figure 4 , the manufacturing method includes:
[0051] Step 201: Provide a substrate.
[0052] Step 202: sequentially growing a buffer layer, an undoped GaN layer, an N-type GaN layer, a multi-quantum well layer, an electron blocking layer and a P-type GaN layer on the substrate.
[0053] In this embodiment, the electron blocking layer includes a first sublayer, a second sublayer, and a third sublayer stacked in sequence, and the first sublayer includes a plurality of first AlGaN layers and a plurality of second AlN layers stacked alternately. The gallium nitride layer, the second sub-layer includes a plurality of third aluminum gallium nitride layers and a plurality of first indium gallium nitride layers stacked alternately, and the third sublayer i...
Embodiment 3
[0068] An embodiment of the present invention provides a method for manufacturing a light-emitting diode epitaxial wafer, and the manufacturing method provided in this embodiment is a specific realization of the manufacturing method provided in Embodiment 2. In this embodiment, Veeco K465i or C4 Metal Organic Chemical Vapor Deposition (English: Metal Organic Chemical Vapor Deposition, abbreviated: MOCVD) equipment is used to realize the manufacture of LED epitaxial wafers. Using high-purity hydrogen (H 2 ) or high-purity nitrogen (N 2 ) or high purity H 2 and high purity N 2 The mixed gas as the carrier gas, high-purity NH 3 As nitrogen source, trimethylgallium (TMGa) and triethylgallium (TEGa) as gallium source, trimethylindium (TMIn) as indium source, trimethylaluminum (TMAl) as aluminum source, silane (SiH4) as N-type dopant, magnesium dicene (CP 2 Mg) as a P-type dopant. The pressure of the reaction chamber is controlled at 100-600 torr.
[0069] Specifically, see ...
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