PECVD-based enhanced graphene film coating device and method

Abstract

The invention discloses a PECVD-based enhanced graphene film coating device and method. The device comprises a plurality of vacuum chambers including an uncoiling chamber, a plurality of coating chambers and a coiling chamber which are connected in sequence. In each coating chamber, the upper side and the lower side of a foam nickel base material are provided with a radio frequency discharge plate and a plasma magnetic control enhancement device correspondingly. The method comprises the steps that in the coating chambers, the radio frequency discharge plates are started for discharging, plasma is generated, the plasma magnetic control enhancement devices form closed loop magnetic fields below the radio frequency discharge plates, the plasma makes spiral rotation under the action of the magnet fields, and therefore the density of the plasma is increased, and a film layer is deposited on the surface of each foam nickel base material. By means of the PECVD-based enhanced graphene film coating device and method, the chemical reaction speed of plasma gas is increased, and the thickness of the deposited film layers is also greatly increased and can be up to four to eight times that of a film prepared by a traditional coating device. Meanwhile, the surface temperature of the foam nickel base materials can be increased to 600 or over, the graphene film forming condition is enhanced, and the graphene film forming speed is increased.

Description

technical field [0001] The invention relates to the technical field of flexible substrate coating, in particular to a PECVD-based enhanced graphene film coating equipment and method. Background technique [0002] Graphene is a planar hexagonal honeycomb two-dimensional crystal composed of a single layer of carbon atoms, and is the basic unit of other carbon materials. The special two-dimensional structure makes graphene have excellent mechanical strength, extremely high hardness and tensile strength; it also has high mobility, which can theoretically reach 200000cm2V-1s-1; it also has good electrical conductivity, thermal conductivity and High light transmission. The above excellent properties of graphene make it have broad application prospects in microelectronic devices, "green" energy storage devices, aviation devices and other fields. [0003] However, research has found that graphene with a two-dimensional structure is prone to agglomeration, which reduces its specifi...

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Problems solved by technology

However, in the actual production process, when coating a large area, the uniformity of the coating is still a prominent problem. At the same time, the density of the plasma is far from enough, and the uniformity of the coating and the density of the plasma directly affect the product quality. , so it is of great significance to solve this problem

In addition, when applying this method to plate graphene on a nickel foam substrate, since the surface of the nickel foam substrate is relatively smooth, it is easy to deviate or shift during transmission on the production line, which is not conducive to the normal progress of the coating process.

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