Carbon nanotube array slices with precisely controlled length and diameter and preparation method and application thereof
A carbon nanotube array, oriented carbon nanotube technology, applied in the direction of carbon nanotubes, oriented carbon nanotubes, nanocarbons, etc., can solve problems such as difficulties
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[0017] 1. Preparation of aligned carbon nanotube array template
[0018] A 10nm aluminum oxide layer and a 1nm iron layer were sequentially prepared on the silicon wafer by means of magnetron sputtering. Using this as a catalyst, it is placed in a tube furnace quartz tube and synthesized by a typical chemical vapor deposition method. Wherein ethylene (30sccm) is used as carbon source, and argon (400sccm) and hydrogen (90sccm) are used as carrier gas, and furnace temperature 750° C. is set. The height of the grown aligned carbon nanotube array is about 2mm.
[0019] 2. Preparation of carbon nanotube arrays with core-shell structure and controllable diameter
[0020] Transfer the array of aligned carbon nanotubes above to another clean silicon wafer, use the same tubular quartz furnace, under the condition of feeding carrier gas argon (flow rate 100-200sccm), the furnace temperature rises to within 23 minutes 1060°C. Under the condition of maintaining the temperature, carbon...
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