Preparation method for conductive, anti-corrosive, wear-resistant and high-hardness diamond-like coating layer
A wear-resistant, high-hardness technology, applied in metal material coating process, coating, ion implantation plating, etc., can solve the problem of high resistance of carbon-based thin film, reduce the number of droplets, improve the quality and performance, The effect of easy temperature control
Inactive Publication Date: 2017-11-10
大连金泰正新科技有限公司
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The invention discloses a preparation method for a conductive, anti-corrosive, wear-resistant and high-hardness carbon-based film. The preparation method comprises the following steps: heating by virtue of a heating pipe in a vacuum chamber; ionizing argon gas by virtue of an ion source; cleaning and activating a base material clamped on a rotating stand in the vacuum chamber; carrying out magnetic target deposition on titanium metal after a vacuum pressure is achieved; then carrying out acetylene ionization by virtue of the ion source; and finally cooling in an inert gas. The conductivity, anti-corrosive property, wear resistance, high hardness and other performance of the film prepared by the preparation method disclosed by the invention meet the application needs of many industries such as semiconductors, mobile phones, chemical electrolysis and electric spark machining.
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Property | Measurement | Unit |
Thickness | 1.0 ~ 2.0 | µm |
tensile | MPa | |
Particle size | Pa | |
strength | 10 |
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