A kind of preparation method of homogeneous polysilicon suede surface
A polycrystalline silicon and polycrystalline silicon wafer technology, which is applied in the field of solar cells, can solve the problems of uneven control of chemical reactions, poor uniformity of the surface structure of polycrystalline silicon suede, etc.
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example 1
[0016] According to the mass ratio of 1:5, tetrapropylammonium hydroxide and deionized water were mixed, at room temperature, stirred and mixed at 300r / min for 25min to obtain a mixed solution, and then tetraethyl orthosilicate was added dropwise to the mixed solution to control The dripping time is 25min. After the dripping is completed, stand at room temperature for 10h to obtain a static solution. According to a mass ratio of 1:10, mix the static solution with deionized water to obtain a diluted solution, and then pass nitrogen to remove the air. Under the conditions of nitrogen atmosphere and 0°C ice-water bath, add 15% mass fraction of butyl orthotitanate isopropanol solution to the diluent dropwise at a dropping rate of 1mL / min, then keep it warm for 2 hours, and then ultrasonically disperse at 200W 10min to obtain a dispersion; according to the mass ratio of 1:3:5, mix deionized water, 25% hydrofluoric acid and 65% nitric acid solution, and stir at room temperature for 2...
example 2
[0018] According to the mass ratio of 1:5, tetrapropylammonium hydroxide and deionized water were mixed, at room temperature, stirred and mixed at 400r / min for 27min to obtain a mixed solution, and then tetraethyl orthosilicate was added dropwise to the mixed solution to control The dropping time is 27 minutes. After the dropping is completed, stand at room temperature for 11 hours to obtain a static solution. According to a mass ratio of 1:10, mix the static solution with deionized water to obtain a diluted solution, and then pass nitrogen to remove the air. Under the conditions of nitrogen atmosphere and ice-water bath at 2°C, add a 15% mass fraction of butyl orthotitanate isopropanol solution to the diluent dropwise at a rate of 1mL / min, then keep it warm for 3 hours, and then disperse it ultrasonically at 250W. 12min to obtain a dispersion; according to the mass ratio of 1:3:5, mix deionized water, 25% hydrofluoric acid and 65% nitric acid solution, and stir at room tempera...
example 3
[0020] According to the mass ratio of 1:5, tetrapropylammonium hydroxide and deionized water were mixed, at room temperature, stirred and mixed at 500r / min for 30min to obtain a mixed solution, and then tetraethyl orthosilicate was added dropwise to the mixed solution to control The dropping time is 30min. After the dropping is completed, stand at room temperature for 12 hours to obtain a static solution. According to a mass ratio of 1:10, mix the static solution with deionized water to obtain a diluted solution, and then pass nitrogen to remove the air. Under a nitrogen atmosphere and a 5°C ice-water bath, add a 15% mass fraction of butyl orthotitanate isopropanol solution to the diluent dropwise at a rate of 1 mL / min, then keep it warm for 3 hours, and then disperse it ultrasonically at 300W. 15min to obtain a dispersion; according to the mass ratio of 1:3:5, mix deionized water, 25% hydrofluoric acid and 65% nitric acid solution, and stir at room temperature for 30min to obt...
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