SiNbCN multi-element gradient cutting tool with composite coating and preparation method thereof
A composite coating and gradient technology, applied in the coating, metal material coating process, ion implantation plating, etc., to achieve high hardness and toughness, excellent resistance to plastic deformation, and good resistance to diffusion wear
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Embodiment 1
[0022] The SiNbCN multi-element gradient composite coating tool and its preparation method of the present invention, the tool is a common machine chuck blade, the base material is: cemented carbide P10, the coated tool is sequentially from the inside to the outside of the tool base, Ti transition layer, SiNbC transition layer and SiNbCN multi-element gradient composite coating with gradient nitrogen content. The deposition method is a composite coating method of unbalanced magnetron sputtering + arc plating. Two unbalanced magnetron sputtering SiNbC composite targets and two arc plating Ti targets are used for deposition. First, the Ti transition layer is deposited by arc plating, and then the SiNbC transition layer and SiNbCN multi-layer gradient composite coating with gradient nitrogen content are deposited by unbalanced magnetron sputtering method. The specific steps are as follows:
[0023] (1) Pre-treatment: Polish the surface of the tool base to remove surface oil, rust ...
Embodiment 2
[0030] The present invention SiNbCN multi-element gradient composite coating cutting tool and its preparation method, the cutting tool is a common reamer, the cutting tool matrix material is: M2 high speed steel, the coated cutting tool is the cutting tool matrix, Ti transition layer, SiNbC transition layer in sequence from inside to outside And SiNbCN multi-element gradient composite coating with gradient nitrogen content. The deposition method is a composite coating method of unbalanced magnetron sputtering + arc plating. Two unbalanced magnetron sputtering SiNbC composite targets and two arc plating Ti targets are used for deposition. First, the Ti transition layer is deposited by arc plating, and then the SiNbC transition layer and SiNbCN multi-layer gradient composite coating with gradient nitrogen content are deposited by unbalanced magnetron sputtering method. The specific steps are as follows:
[0031] (1) Pre-treatment: Polish the surface of the tool base to remove im...
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