Manufacturing method of flexible substrate, flexible substrate and flexible display panel

Abstract

The disclosure belongs to the field of display panels, and in particular relates to a manufacturing method of a flexible substrate, a flexible substrate and a flexible display panel. The manufacturing method includes: providing a glass substrate, forming a first flexible material layer on the surface of the glass substrate; depositing and preparing a barrier inorganic layer on the surface of the first flexible material layer; wherein the barrier inorganic layer includes a silicon oxide material layer and at least one of the silicon nitride material layers; when the deposition of the barrier inorganic layer is completed, the surface of the barrier inorganic layer is subjected to plasma bombardment treatment to improve the wettability of the surface of the barrier inorganic layer; A second flexible material layer is formed on the surface of the inorganic layer, and the glass substrate is peeled off. The present disclosure can ensure good adhesion and film formation of the second flexible material layer on the barrier inorganic layer, without additionally depositing an interface inorganic layer to improve problems such as poor interface adhesion, and the process is simple and cost-effective.

Description

technical field [0001] The present disclosure relates to the technical field of display panels, and in particular to a method for manufacturing a flexible substrate, a flexible substrate prepared by the method, and a flexible display panel including the flexible substrate. Background technique [0002] With the development of science and technology and the progress of society, various display devices have been widely used in daily life. On the basis of the extensive use of these display devices, ultra-thin flexible display devices similar to paper are considered to be the next generation of display devices because they can be bent and have good portability. [0003] At present, the market has higher and higher requirements for ultra-thin flexible display products. In order to meet product requirements, more display devices will use flexible materials such as plastics and metals to make display substrates. For example, polyimide PI (Polymide) material is widely used due to ...

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Problems solved by technology

[0004] In related technologies, flexible display substrates prepared based on PI need to improve the properties of the first PI layer such as water barrier, oxygen barrier, and scratch resistance by depositing a barrier inorganic layer. Problems such as poor interface adhesion between layers

In the related art, the above-mentioned problem of poor interface adhesion is improved by depositing an interface inorganic layer, but problems such as stress matching and foreign matter are derived from this.

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