Ion Beam Polishing Machine for Reducing Short Circuit Frequency of Tungsten Wire

Abstract

The invention discloses an ion beam polishing machine with a function of reducing short circuit frequencies of a tungsten wire. The ion beam polishing machine comprises a discharge chamber, an anode plate and grating plates. A mounting block is arranged on the outermost-layer grating plate, the tungsten wire is arranged on the mounting block, a plurality of ceramic spheres are fixedly connected with the top surfaces of the grating plates, a plurality of first grooves are formed in the bottom surfaces of the grating plates, and the surfaces of the first grooves are spherical surfaces with the radiuses equal to the radiuses of the ceramic spheres; the ceramic spheres of the lower-layer grating plate of every two adjacent grating plates are arranged in the first grooves of the upper-layer grating plate; a second groove with an open end is formed in a side surface of the mounting block, the open direction of the second groove faces the direction in which the tungsten wire extends to the outer side of the mounting block, and the pore diameter of the second groove is linearly increased from the open end to the inside of the second groove. The ion beam polishing machine has the advantages that the problem that existing ion beam polishing machines cannot keep normally working for a long time in the prior art can be solved by the aid of the ion beam polishing machine, and the purposes of prolonging the normal working time of the ion beam polishing machine and reducing clearing frequencies can be achieved.

Description

technical field [0001] The invention relates to the field of ion beam polishing, in particular to an ion beam polishing machine for reducing the short-circuit frequency of tungsten wires. Background technique [0002] The so-called ion beam polishing is to put inert gas, such as argon, nitrogen, etc. in a closed space, and use high-frequency electromagnetic oscillation or discharge to heat the cathode current to ionize it into positive ions, and then use 5,000 to 100,000 volts to The high voltage accelerates these positive ions, giving them a certain amount of energy. Use electron lens to focus, focus them into a thin beam, form a high energy density ion flow, under the control of the computer, bombard the surface of the workpiece that has been finely ground in the vacuum chamber, and sputter the workpiece material atom by atom from the surface . In this way, the surface of the workpiece can be precisely machined with a depth from 100 angstroms to about 10 microns. Most o...

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Problems solved by technology

[0003] The purpose of the present invention is to provide an ion beam polishing machine that reduces the short-circuit frequency of tungsten wires, so as to solve the problem that the ion beam polishing machine cannot maintain normal operation for a long time in the prior art, so as to improve the normal working time of the ion beam polishing machine and reduce the cleaning frequency the goal of

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