A wafer-level fan-out packaging structure and packaging method

A technology of packaging structure and packaging method, which is applied in the direction of semiconductor/solid-state device parts, semiconductor devices, electrical components, etc., can solve the problems of poor electrical performance and poor electromagnetic shielding function of wafer-level packaging structure, and reduce chip displacement The possibility of reducing impact and improving the effect of electrical performance

Active Publication Date: 2020-02-07
NAT CENT FOR ADVANCED PACKAGING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Therefore, the technical problem to be solved by the present invention is to solve the poor electromagnetic shielding function of the wafer-level packaging structure, the chip inside the packaging structure may be interfered by the electromagnetic wave interference of the packaging structure itself and the packaging structure, and the electrical performance of the wafer-level packaging structure. poor problem

Method used

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  • A wafer-level fan-out packaging structure and packaging method
  • A wafer-level fan-out packaging structure and packaging method
  • A wafer-level fan-out packaging structure and packaging method

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Embodiment 1

[0040] The embodiment of the present invention discloses a wafer-level fan-out packaging structure, please refer to figure 1 , figure 1 It is a schematic diagram of a three-dimensional structure of a wafer-level fan-out packaging structure disclosed in an embodiment of the present invention, including: a frame 1, which is used to place one or more chips 2; the frame 1 is connected to the ground; the package body 3. The frame 1 and the chip 2 are packaged in the package 3; the lower surface of the package 3 is located on the same plane as the lower surface of the frame 1 and the device surface of the chip 2. In this embodiment, the coefficient of linear expansion of the frame 1 is greater than that of the chip 2, and the frame 1 is a high-rigidity frame. Specifically, the material of the frame 1 is a metal conductor, such as copper, aluminum, alloy, etc. or the surface is plated with Metallic ceramic materials. Ground the metal or the metal-plated frame 1 so that the package ...

Embodiment 2

[0052] The embodiment of the present invention discloses a wafer-level fan-out packaging method, please refer to image 3 , image 3 A process flow chart of a wafer-level fan-out packaging method disclosed in this embodiment includes the following steps:

[0053] Step S1: providing a substrate, and setting an adhesive film on the substrate. Please refer to Figure 4 , Figure 4 It is a schematic diagram of setting an adhesive film on a substrate disclosed in an embodiment of the present invention. In this embodiment, the material of the substrate 7 can be a metal substrate or a glass substrate, and the adhesive film 8 can be a heat-peelable adhesive or a UV adhesive film. In a specific embodiment, the adhesive film 8 may be disposed on the substrate 7 by means of spray coating, spin coating, or film sticking. Preferably, the thickness of the adhesive film 8 is less than 100 um.

[0054] Step S2: Paste the frame on the adhesive film, and ground the frame. Please refer to ...

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Abstract

The invention discloses a wafer-level fan-out packaging structure with electromagnetic shielding and a packaging method, wherein the wafer-level fan-out packaging structure includes: a frame, one or more chips are placed inside the frame; the frame is connected to a ground wire; the packaging The body, frame and chip are packaged in a package; the lower surface of the package is on the same plane as the lower surface of the frame and the device surface of the chip. Ground the metal conductor or the frame of the ceramic material coated with metal on the surface, so that the package body and the frame in the wafer-level fan-out packaging structure form a complete circuit, thus reducing the damage to the chips inside the wafer-level packaging and the structure. The packaging structure itself and the possibility of electromagnetic wave interference outside the packaging structure improve the electrical performance of the wafer-level fan-out packaging structure.

Description

technical field [0001] The invention relates to the technical field of semiconductor packaging, in particular to a wafer-level fan-out packaging structure and a packaging method with an electromagnetic shielding function. Background technique [0002] With the increasing integration of electronic devices, the market is increasingly demanding microelectronic products with small size, high density and thin packaging. In order to adapt to the rapid increase in pin density per unit area of ​​the chip, wafer-level packaging technology has achieved a high degree of miniaturization. At the same time, with the reduction of chip size and the increase of wafer area, the manufacturing cost has been significantly reduced. Fan-out packaging technology is a branch of wafer-level packaging technology. Its package height and package size are greatly reduced. At the same time, its heat dissipation capability and signal integrity performance are good, and electromagnetic shielding can be dire...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L23/31H01L23/544H01L23/552H01L21/56
CPCH01L23/544H01L23/552H01L21/56H01L23/31H01L2224/12105H01L2224/96H01L2924/3025
Inventor 姚大平宋涛
Owner NAT CENT FOR ADVANCED PACKAGING
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