Silicon-based integrated tunable laser structure and control method thereof

Abstract

The invention relates to the technical field of lasers, and provides a silicon-based integrated tunable laser structure and a control method thereof. A silicon-based micro-ring resonator, a backlightdetector and a silicon-based coupling output waveguide are manufactured on a silicon substrate. The resonator is bonded to be right above the waveguide of the silicon-based micro-ring resonator through a high-molecular polymer. A semiconductor refrigerator is arranged at the bottom of the silicon substrate and corresponds to the area wherein the silicon-based micro-ring resonator is located. An optical signal coupling structure is established below the waveguide of the silicon-based micro-ring resonator and at the middle region of the silicon-based coupling output waveguide. One end of the silicon-based coupling output waveguide is a light emitting surface. The other end of the silicon-based coupling output waveguide is coupled with the backlight detector. According to the invention, an active area is arranged above a silicon optical chip and the depth of the space is reasonably utilized. The space utilization efficiency is higher and the size of a manufactured optical device is smaller. The integration degree is high. The silicon-optical chip process is compatible with the CMOS process. Both the machinability and the yield are realized.

Description

【Technical field】 [0001] The invention relates to the technical field of lasers, in particular to a silicon-based integrated tunable laser structure and a control method thereof. 【Background technique】 [0002] Tunable lasers have been a research hotspot in the field of optical communication in recent years. [0003] The traditional light sources in the field of optical communication are all based on fixed-wavelength laser modules. With the continuous development and application of optical communication systems, the shortcomings of fixed-wavelength lasers are gradually revealed: on the one hand, with the development of DWDM technology, the number of wavelengths in the system There are hundreds of them. In the case where protection needs to be provided, the backup of each laser must be provided by a laser of the same wavelength, which leads to an increase in the number of backup lasers and an increase in cost; on the other hand, because fixed lasers need to distinguish wavele...

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Problems solved by technology

[0008] The technical problem to be solved by the present invention is that the silicon-based tunable laser in the prior art has a large volume and low integration; and, as figure 1 As shown, because of the optical path coupling involving the active resonator 1 and the passive mode selection cavity 2, the processing complexity of the silicon-based tunable laser is increased, which is not conducive to industrial processing and production

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