Multi-functional graphene flexible sensor having high resistance strain sensitivity coefficient and high deformation capability and preparation method thereof
A flexible sensor and graphene technology, applied in the field of flexible wearable sensors and their preparation, multifunctional wrinkled graphene flexible sensors, can solve the problems of inability to have both high resistance strain sensitivity coefficient and high strain sensing range, single function, etc. Achieve the effect of high resistance strain sensitivity coefficient, high strain sensing range and low cost
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[0056] Preparation of woven mesh graphene film. The woven mesh graphene film can be obtained by depositing and growing on the surface of the woven mesh metal catalyst by CVD chemical vapor deposition and removing the woven mesh metal catalyst, but other methods for obtaining the woven mesh graphene film are not excluded. The woven mesh metal catalyst used in the CVD chemical vapor deposition method may be a metal copper woven mesh or a metal nickel woven mesh or the like. The gas used in the CVD chemical vapor deposition method may be a mixed gas of a carbon source, hydrogen, and argon. The carbon source may be high purity methane gas. The gas inlet rate of the mixed gas may be 40-60 mL / min. The intake time of the carbon source may be 10-30 minutes. The woven mesh metal catalyst is woven from metal fibers (such as metal copper wires or metal nickel wires). The woven mesh metal catalyst is preferably formed by alternately woven metal fibers in the warp and weft directions. ...
Embodiment 1
[0066] The cleaned metal copper braided mesh (100 mesh, wire diameter 100μm, such as figure 1 (Shown) placed in a CVD furnace tube at 1000°C, grown for a certain time (25min) under a mixed gas of methane, hydrogen, and argon (methane 55ml / min) to obtain a copper woven mesh deposited with graphene, such as figure 2 Shown. Further etching to remove the metal copper to obtain a woven mesh graphene. After that, using Dragonskin as a flexible substrate, transfer a layer of woven mesh graphene film and attach it to the surface of the flexible substrate. The angle between the fibers of the woven mesh graphene and the pre-stretching direction is 45°. Finally, silver paste and copper leads are used to set electrodes on both ends of the graphene, and the liquid substrate material is coated on the surface and cured to obtain a flexible sensor.
Embodiment 2
[0068] The cleaned metal copper braided mesh (100 mesh, wire diameter 100μm) is placed in a CVD furnace tube at 1000°C, and grown for a certain time (25min) under a mixed gas of methane, hydrogen, and argon (methane 55ml / min), and further The metal copper is removed by etching to obtain a woven mesh graphene. Afterwards, use Dragon skin as the flexible substrate, pre-stretch the flexible substrate (stretch the length of the flexible substrate to 1.13 times the original length), and transfer a layer of woven mesh graphene film to attach it to the surface of the flexible substrate. Furthermore, completely releasing and restoring the flexible substrate to a relaxed state causes the woven mesh graphene loaded on it to produce a certain degree of wrinkles. Then transfer a layer of woven mesh graphene to obtain a corrugated woven mesh graphene film with 2 layers stacked from top to bottom and closely adhered to each other. The angle between the fibers of the woven mesh graphene and ...
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