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A kind of graphene transfer method

A transfer method, graphene technology, applied in the graphene field, can solve problems such as difficult to remove, difficult to salvage, easy to wrinkle, etc., to achieve the effect of simple transfer process, easy removal, and avoiding wrinkles

Active Publication Date: 2020-06-09
XIFENG 2D FUJIAN MATERIAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But this method has the following problems: (1) graphene is easy to break; (2) PMMA will remain and is not easy to completely remove; (3) after removing the grown copper, it is not easy to salvage, and the flatness of the target substrate is not enough, and it is easy to wrinkle; ( 4) It is difficult to transfer large areas without loss
[0004] Therefore, in order to broaden the application field of graphene and transfer graphene to the target substrate matching the device in a complete, non-destructive, large-area, pollution-free and mature process, the existing transfer technology needs to be improved.

Method used

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  • A kind of graphene transfer method
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Experimental program
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Effect test

Embodiment 1

[0038] S101: generating graphene on copper, forming copper / graphene: generating graphene on copper by chemical vapor deposition (CVD).

[0039] S102: Coating PMMA on the graphene surface to form copper / graphene / PMMA: a) preparing a PMMA solution: dissolving 4wt% PMMA in an acetone solution, stirring for 20 minutes, and ultrasonicating for 3 hours to obtain a uniformly dissolved PMMA solution;

[0040] b) Coating PMMA solution: Copper / graphene is placed on the platform of the coating machine, fixed with electrostatic film around, then drop into PMMA solution on its surface, set coating parameters: step1: rotating speed 1000rpm, time 10S; step2: The rotation speed is 2000rpm, and the time is 30S; the surface is coated with a layer of copper / graphene / PMMA with a thickness of about 5um PMMA;

[0041] c) Solvent removal by baking: put the copper / graphene / PMMA on a heating platform, and bake at a heating temperature of 150° C. for 10 minutes.

[0042] S103: Coating a titanium metal...

Embodiment 2

[0055] S101: generating graphene on copper, forming copper / graphene: generating graphene on copper by chemical vapor deposition (CVD).

[0056] S102: Coating PMMA on the graphene surface to form copper / graphene / PMMA;

[0057] a) Prepare PMMA solution: dissolve 5wt% PMMA in acetone solution, stir for 30min, and ultrasonicate for 5h to obtain a uniformly dissolved PMMA solution;

[0058] b) Coating PMMA solution: Copper / graphene is placed on the platform of the coating machine, fixed with electrostatic film around, then drop into PMMA solution on its surface, set coating parameters: step1: rotating speed 1000rpm, time 30S; step2: The rotation speed is 2500rpm, and the time is 10s; the copper / graphene / PMMA coated with a layer of PMMA with a thickness of about 10 μm is obtained on the surface;

[0059] c) Solvent removal by baking: put the copper / graphene / PMMA on a heating platform, and bake at 160° C. for 10 minutes.

[0060] S103: Coating a titanium metal film on the surface o...

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Abstract

The invention discloses a graphene transfer method, which comprises: forming graphene on copper so as to form copper / graphene; coating the surface of the graphene with PMMA to form copper / graphene / PMMA; plating the PMMA surface with a titanium metal film to form a copper / graphene / PMMA / titanium metal film; etching to remove the copper to form a graphene / PMMA / titanium metal film; adhering the graphene / PMMA / titanium metal film to a target substrate to form a target substrate / graphene / PMMA / titanium metal film; and removing the PMMA / titanium metal film, and carrying out subsequent treatment to obtain the target substrate / graphene. According to the present invention, the PMMA surface is plated with the titanium metal film, and the titanium metal has advantages of high strength and high hardness,such that the spreadability of the graphene can be maintained during the removal of the copper, the phenomena such as graphene wrinkle, graphene rupture and the like can be effectively avoided, and the graphene is easily adhered to the target substrate; when the PMMA is coated, the baking temperature achieves the glass transition temperature of the PMMA, such that the PMMA can be easily removed without residue; and the periphery of the copper / graphene / PMMA / titanium metal film is fixed by the equipment clamper, such that the flatness can be increased.

Description

technical field [0001] The invention relates to the field of graphene, in particular to a graphene transfer method. Background technique [0002] Graphene is a material in which carbon atoms are bonded in a hexagonal network. It has many excellent electrical and mechanical properties and is expected to be used in high-speed transistors, touch panels, and transparent conductive films for solar cells. Since its discovery in 2004, graphene has been a frontier research hotspot. Among all its potential applications, transparent conductive films are the closest to practical applications, and can be used as substitute materials for transparent conductive films that are currently commonly used in touch panels, flexible liquid crystal panels, and organic light-emitting diodes. The reason why transparent conductive films are expected to be used is that graphene has high carrier mobility, thin thickness, and high transparency. However, the application of graphene as a transparent con...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B32/184
Inventor 杨与畅
Owner XIFENG 2D FUJIAN MATERIAL TECH CO LTD