Method for directly writing magneto-optic waveguide on diamagnetic photosensitive glass by using femtosecond laser

A photosensitive glass and femtosecond laser technology, which is applied in the field of femtosecond laser preparation of optical devices, can solve the problems that it cannot be used outdoors, harsh environments, and unfavorable magneto-optical waveguide applications.
CN107765367AInactive Publication Date: 2018-03-06HENAN UNIVERSITY OF TECHNOLOGY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HENAN UNIVERSITY OF TECHNOLOGY
Publication Date
2018-03-06
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a method for directly writing a magneto-optic waveguide on diamagnetic photosensitive glass by using femtosecond laser. A micro channel pattern is drawn and imported through software, and a 40X objective lens and a 520-micron slit are used to focus laser in a direction orthogonal to the surface of well-polished glass and the transmission of a laser beam. Scanning is repeated 4-12 times at the repetition rate of 100kHz, at the power of 0.1-0.5W and at the current of 21-25A, and the depth of irradiation is 170 microns. A magneto-optic waveguide can be obtained through movement at the pulse energy of 150-350nJ and at the speed of 1.5mm / min according to a set scanning pattern. After ultrasonic concussion cleaning, annealing is carried out for 2 hours at 260-290 DEG C. The magneto-optic waveguide obtained is 150-500 microns wide, and the refractive index increases by 3-9*10<-2>. The method provides a carrier with good magneto-optical property for the magneto-optic waveguide, reduces the complexity of the magneto-optical waveguide structure, and improves the sensitivity and speed of magnetic field response of devices. The method is simple and nontoxic, consumes less energy, and has a wide range of application.
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Description

technical field

[0001] The invention relates to an optical device prepared by a femtosecond laser, in particular to the technical field of a magneto-optic photosensitive glass-based magneto-optical waveguide chip. Background technique

[0002] Driven by the demand from magneto-optical isolators and various sensor applications based on the principle of magnetic field sensing, the integration of magneto-optic functions on integrated optical chips has become a new research hotspot. Integrated magneto-optic devices on glass substrates It has also received great attention. The manufacture of magneto-optical waveguides is the basis for constructing magneto-optic functional integration, and it is also the core problem that must be solved to realize magneto-optical functional integration.

[0003] At present, the manufacture of glass-based magneto-optical waveguides is mainly to form a waveguide region on a glass substrate by ion exchange or laser writing technology, and then depos...

Claims

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