Silicon schottky junction taking Bi2Se3 film as contact layer and preparation method
A Schottky junction and contact layer technology, used in electrical components, circuits, semiconductor devices, etc., can solve the problem that the quality of the heterojunction interface cannot be guaranteed, the characteristics of the silicon Schottky junction are deteriorated, and it is not suitable for large-scale production. and other problems, to achieve excellent optical and electrical properties, reduce Si surface state density, and achieve ideal properties.
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[0029] Example 1:
[0030] Such as figure 1 As shown, this embodiment includes an n-type Si substrate 2. The resistivity of the Si substrate 2 is 0.001Ω·cm, and the upper part of the Si substrate 2 is provided with Bi 2 Se 3 Schottky contact layer 1, Bi 2 Se 3 The thickness of the Schottky contact layer 1 is 5nm, the bottom of the Si substrate 2 is provided with an ohmic contact back electrode 3, Bi 2 Se 3 The Schottky contact layer 1 is provided with an ohmic contact electrode 4 made of Al and a thickness of 20nm, Bi 2 Se 3 An adhesive layer is provided between the Schottky contact layer 1 and the ohmic contact electrode 4, and the adhesive layer is made of Cr.
[0031] Preferably, the Si substrate 2 of this embodiment is a (111)-oriented single crystal.
[0032] One with Bi 2 Se 3 The method for preparing a silicon Schottky junction with a thin film as a contact layer includes the following steps:
[0033] (A) After cleaning the Si substrate with the crystal orientation of (111) by t...
Example Embodiment
[0039] Example 2:
[0040] Such as figure 1 As shown, this embodiment includes a p-type Si substrate 2. The resistivity of the Si substrate 2 is 10Ω·cm, and the upper part of the Si substrate 2 is provided with Bi with a thickness of 27.5 nm. 2 Se 3 Schottky contact layer 1, the bottom of Si substrate 2 is provided with ohmic contact back electrode 3, Bi 2 Se 3 The Schottky contact layer 1 is provided with an ohmic contact electrode 4 made of Ag and a thickness of 110nm, Bi 2 Se 3 An adhesive layer is provided between the Schottky contact layer 1 and the ohmic contact electrode 4, and the adhesive layer is made of Ti.
[0041] Preferably, the Si substrate 2 of this embodiment is a (111)-oriented single crystal.
[0042] One with Bi 2 Se 3 The method for preparing a silicon Schottky junction with a thin film as a contact layer includes the following steps:
[0043] (A) After cleaning the Si substrate with the crystal orientation of (111) by the RCA chemical cleaning method, it is treate...
Example Embodiment
[0049] Example 3:
[0050] Such as figure 1 As shown, this embodiment includes a type of high-resistance n-Si substrate 2 close to intrinsic conductivity. The resistivity of the Si substrate 2 is 5000 Ω·cm, and the upper part of the Si substrate 2 is provided with a Bi with a thickness of 50 nm. 2 Se 3 Schottky contact layer 1, the bottom of Si substrate 2 is provided with ohmic contact back electrode 3, Bi 2 Se 3 The Schottky contact layer 1 is provided with an ohmic contact electrode 4 made of Au and a thickness of 200nm, Bi 2 Se 3 An adhesive layer is provided between the Schottky contact layer 1 and the ohmic contact electrode 4, and the adhesive layer is made of Cr.
[0051] Preferably, the Si substrate 2 of this embodiment is a (111)-oriented single crystal.
[0052] One with Bi 2 Se 3 The method for preparing a silicon Schottky junction with a thin film as a contact layer includes the following steps:
[0053] (A) After cleaning the Si substrate with the crystal orientation of (...
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