Mo-Se-Ta+TiAlTaN soft and hard composite coated tool and manufacturing method thereof
A soft-hard composite, soft coating technology, applied in coating, metal material coating process, ion implantation plating and other directions, to achieve the effect of simple preparation method, long service life and good lubricating performance
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Embodiment 1
[0019] The above-mentioned Mo-Se-Ta+TiAlTaN soft-hard composite coating tool and its preparation method include the following steps:
[0020] (1) Pretreatment: Grind and polish the high-speed steel as the base material of the tool to the mirror surface, put it in alcohol and acetone and ultrasonically clean it for 20 minutes each to remove surface oil stains and other pollutants, use a vacuum drying oven to fully dry it and quickly put it into the vacuum chamber of the coating machine , the background vacuum of the vacuum chamber is 7.0×10 -3 Pa, heat to 220°C, keep warm for 30min;
[0021] (2) Ion cleaning: pass the working gas Ar 2 , the pressure is 0.8Pa, the bias power supply is turned on, the voltage is 750V, the duty cycle is 0.2, and the glow discharge cleaning is 20min; With a current of 50A, ions bombard the Ti target for 2 minutes;
[0022] (3) Deposition of Ti transition layer: adjust Ar 2 The air pressure is reduced to 0.5Pa, the bias voltage is reduced to 150V...
Embodiment 2
[0029] The above-mentioned Mo-Se-Ta+TiAlTaN soft-hard composite coating tool and its preparation method include the following steps:
[0030] (1) Pretreatment: Grind and polish the cemented carbide as the base material of the tool to the mirror surface, put it into alcohol and acetone and ultrasonically clean it for 30 minutes each, remove surface oil stains and other pollutants, use a vacuum drying oven to fully dry it, and then quickly put it into the coating machine to vacuum chamber, the background vacuum of the vacuum chamber is 7.0×10 -3 Pa, heat to 230°C, hold for 40min;
[0031] (2) Ion cleaning: pass the working gas Ar 2 , the pressure is 1.2Pa, the bias power supply is turned on, the voltage is 900V, the duty ratio is 0.2, and the glow discharge cleaning is 30min; Current 65A, ion bombardment Ti target 2min;
[0032] (3) Deposition of Ti transition layer: adjust Ar 2The air pressure is reduced to 0.6Pa, the bias voltage is reduced to 200V, and the arc plating is ...
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Abstract
Description
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Application Information
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