Low-thermal-resistance high-response-frequency high-deformation electromagnetic driven MEMS deformable mirror and manufacturing method thereof
An electromagnetic drive and frequency response technology, which is applied in the field of large deformation electromagnetic drive MEMS deformable mirror and production, high response frequency, and low thermal resistance, can solve the problems of high cost, restricted development and application, and low resonance frequency, so as to reduce production Reduced cost, total thickness requirements, and low thermal resistance
Pending Publication Date: 2018-03-30
MINGDEZHIXING BEIJING TECH CO LTD
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[0053] Please refer to figure 2 , image 3 , Figure 4 ,and Figure 5 , the present embodiment provides a method for manufacturing an electromagnetically driven MEMS deformable mirror with low thermal resistance, high response frequency and large deformation, including:
[0054] Step (1): multi-layer coil MEMS drive fabrication, which includes,
[0055] Step A, providing an SOI wafer, which includes a Si structure layer 11, an oxide layer 12 and a Si substrate layer 13; the SOI wafer can be purchased directly, or the Si wafer can be oxidized on one side, then bonded with another Si wafer, and then polished be made of. The thickness of the Si structure layer is 1 to 200 microns, the thickness of the oxide layer is 0.2 to 20 microns, and the thickness of the substrate is 50 to 1000 microns.
[0056] Step B, sputter plating the seed layer 14 on the Si structure layer 11;
[0057] Step C, using the photolithography method to prepare the photoresist 15 of the coil on the see...
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The invention provides a low-thermal-resistance high-response-frequency high-deformation electromagnetic driven MEMS deformable mirror comprising a silicon structure layer; multilayer coils which areformed on the silicon structure layer, wherein each coil is provided with a pad point and a center point; a dielectric layer which covers the multilayer coils; a Si substrate layer which is formed inthe peripheral area of the lower surface of the silicon structure layer; and a deformable mirror surface which packages the multilayer coils on the silicon structure layer, wherein the deformable mirror surface comprises a mirror surface film and a connection salient point which is formed in the center area of the lower surface of the mirror surface film. All layers of the multilayer coils are contacted through the pad points or the center points so that the multilayer coils are enabled to be ordered from the bottom to the top in turn from the bottom of the silicon structure layer. The odd layers and the even layers of the multilayer coils are contacted through the center points, and the even layers and the odd layers are contacted through the pad points. Two welding points interconnectedwith the external part are formed on the pad point of the first layer of coil and the pad point or the center point of the last layer of coil.
Description
technical field [0001] The invention belongs to the field of micro-optical electromechanical systems and adaptive optics, and more particularly relates to an electromagnetically driven MEMS deformable mirror with low thermal resistance, high response frequency and large deformation amount and a manufacturing method. Background technique [0002] In the field of adaptive optics, microelectromechanical systems (MEMS) deformable mirrors have become an important field of deformable mirror fabrication recently due to their low weight, low cost, compactness, process stability, and easy integration into deformable mirror arrays. Electromagnetically driven MEMS deformable mirrors have the advantages of low control voltage, about 1 volt, large deformation of deformable mirrors up to 50 microns, and linear control, so they are widely used in adaptive optics systems. Mainly for space optical communication, microscopes, secondary mirrors of astronomical telescopes, beam shaping and reti...
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IPC IPC(8): G02B26/08
CPCG02B26/085
Inventor 孔庆峰谢海忠彭效冉
Owner MINGDEZHIXING BEIJING TECH CO LTD