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Hydrogen recovery and purification system and control method thereof

A control method, hydrogen technology, applied in the chemical industry, can solve problems such as unsuitable for hydrogen recovery and circulation

Pending Publication Date: 2018-06-01
SUZHOU REFINETEK CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] An object of the present invention is to provide a hydrogen recovery and purification system to solve the problem that the hydrogen recovery and recycling device in the non-pan semiconductor industry is not suitable for the hydrogen recovery and circulation in the pan semiconductor industry in the prior art

Method used

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  • Hydrogen recovery and purification system and control method thereof
  • Hydrogen recovery and purification system and control method thereof
  • Hydrogen recovery and purification system and control method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] This embodiment provides a hydrogen recovery and purification system, such as figure 1 As shown, it includes an exhaust gas processor 1, a water removal device 2, a compressor 6, a first buffer tank 7, a first gas separation membrane group 8, a third hydrogen concentration sensor 3, a first hydrogen concentration sensor 10, and a second hydrogen concentration sensor. sensor 13;

[0046]The air inlet of the tail gas processor 1 is connected to the exhaust gas outlet of the industrial equipment 100, and the tail gas processor 1 purifies the hydrogen in the tail gas flowing through the tail gas processor 1 by spraying chemical reagents. The ammonia gas in the tail gas is removed by pouring the acidic liquid medicine, and the carbon dioxide and sulfur dioxide in the tail gas are removed by spraying lime water. The tail gas processor 1 is a prior art, and will not be repeated here. It should be noted that, according to the actual production situation, multiple tail gas trea...

Embodiment 2

[0057] This embodiment provides a hydrogen recovery and purification system, such as figure 2 As shown, compared with Embodiment 1, the difference between this embodiment and Embodiment 1 is that the hydrogen recovery and purification system provided in this embodiment also includes a second hydrogen storage device 15, a second hydrogen storage device 15 and a first hydrogen storage device 9 has the same structure, the second hydrogen storage device 15 is provided with a fifth impurity gas exhaust port 151, one end of the second hydrogen storage device 15 is connected to the second buffer tank 12 through the control valve 4, and the other end is connected to the second buffer tank 12 through the control valve 4 and The connecting pipeline between the first hydrogen storage device 9 and the first gas separation membrane group 8 is connected, specifically, connected to the pipeline between the control valve 4 and the first hydrogen concentration sensor 10 . Thereby, when the fi...

Embodiment 3

[0060] This embodiment provides a hydrogen recovery and purification system, such as image 3 As shown, compared with Embodiment 2, the difference between this embodiment and Embodiment 2 is that the hydrogen recovery and purification system provided in this embodiment also includes a second gas separation membrane group 16 and a third gas separation membrane group 17, the second gas The separation membrane group 16 and the third gas separation membrane group 17 have the same structure, and the second gas separation membrane group 16 and the third gas separation membrane group 17 are installed between the first buffer tank 7 and the first gas separation membrane group 8, specifically Yes, the inlet of the second gas separation membrane group 16 is connected to the first buffer tank 7, the exhaust port of the second gas separation membrane group 16 is connected to the inlet of the first gas separation membrane group 8, and the second gas separation The second impurity gas exhau...

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Abstract

The invention relates to the chemical field and specifically discloses a hydrogen recovery and purification system and a control method thereof. The system comprises a tail gas processor, a water removal device, a compressor, a first buffer tank, a first gas separation membrane module, a first hydrogen storage device and a second buffer tank, the above parts are orderly connected, an exhaust outlet and an air inlet of an industrial device are respectively connected to the tail gas processor and the second buffer tank, the compressor compresses the gas until pressure of greater than or equal to5 bar, a membrane material of the first gas separation membrane module is prepared from a ceramic material, and a hydrogen storage material of the first hydrogen storage device is a metal alloy hydrogen storage material. The tail gas processor initially purifies hydrogen. Through the separation membrane prepared from the ceramic material, the hydrogen is further purified until the hydrogen purityof 99% or more. Through the alloy hydrogen storage material, the hydrogen concentration is increased to the 5N level. The system solves the problem that the hydrogen recovery and recycling device inthe non-pan semiconductor industry is not suitable for hydrogen recovery and recycling in the pan semiconductor industry.

Description

technical field [0001] The invention relates to the field of chemical industry, in particular to a hydrogen recovery and purification system and a control method thereof. Background technique [0002] With the rapid development of pan-semiconductor industries such as IC manufacturing, LED, flat panel display and photovoltaics, the consumption of electronic-grade hydrogen as a carrier gas and process gas is increasing year by year. [0003] However, in the actual production process, the hydrogen is directly emitted or burned with almost no utilization. For example, in the LED industry, electronic-grade hydrogen is only used as the carrier gas of MOCVD (Metal-organic Chemical Vapor Deposition, metal-organic compound chemical vapor deposition), and when the hydrogen enters the exhaust gas processor, it is directly discharged, which wastes resources and increases The input of production cost has caused pollution to the environment at the same time, and has huge potential safety...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B3/50B01D53/22B01D53/26
CPCB01D53/226B01D53/229B01D53/26C01B3/50C01B3/501C01B3/508B01D2053/221B01D2258/02
Inventor 吴海雷马传龙
Owner SUZHOU REFINETEK CO LTD
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