Preparation method of lanthanum strontium manganese oxide film with negative poisson's ratio
A lanthanum strontium manganese oxide thin film, negative Poisson's ratio technology, applied in metal material coating process, vacuum evaporation coating, coating and other directions, to achieve the effect of low roughness, low cost and great application value
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Embodiment 1
[0029] (1) the used SrTiO 3 (001) The substrate is ultrasonically cleaned in acetone, absolute ethanol, and deionized water in sequence;
[0030] (2) La 0.7 Sr 0.3 MnO 3 The target material and the substrate in step (1) are put into the pulsed laser deposition equipment;
[0031] (3) Carry out vacuum operation on the pulse laser deposition equipment to reach a high vacuum state of 1×10 -4 Pa, after the vacuum degree is reached, the substrate is heated, and the heating temperature is 720°C;
[0032] (4) The pulsed laser deposition equipment in the high vacuum state obtained in step (3) is subjected to a flow oxygen circulation operation, and the oxygen pressure is 1×10 -2 Pa;
[0033] (5) Depositing the pulsed laser deposition equipment in step (4), the laser pulse width is 10ns, the laser energy is 180 mJ, and the laser frequency is 3Hz; the deposition time is 5min, and the thickness is 10nm. 0.7 Sr 0.3 MnO 3-δ film;
[0034] (6) Carry out XRD test to gained film, i...
Embodiment 2
[0040] The difference with embodiment 1 is:
[0041] (1) the used SrTiO 3 (001) The substrate is ultrasonically cleaned in acetone, absolute ethanol, and deionized water in sequence;
[0042] (2) La 0.7 Sr0.3 MnO 3 The target material and the substrate in step (1) are put into the pulsed laser deposition equipment;
[0043] (3) Carry out vacuum operation on the pulse laser deposition equipment to reach a high vacuum state of 1×10 -4 Pa, after the vacuum degree is reached, the substrate is heated, and the heating temperature is 730°C;
[0044] (4) The pulsed laser deposition equipment in the high vacuum state obtained in step (3) is subjected to a flow oxygen circulation operation, and the oxygen pressure is 1×10 -2 Pa;
[0045] (5) Depositing the pulsed laser deposition equipment in step (4), the laser pulse width is 10ns, the laser energy is 180 mJ, and the laser frequency is 3Hz; the deposition time is 15min, and the thickness is 68nm. 0.7 Sr 0.3 MnO 3-δ film;
[...
Embodiment 3
[0053] The difference with embodiment 1 is:
[0054] (1) the used SrTiO 3 (001) The substrate is ultrasonically cleaned in acetone, absolute ethanol, and deionized water in sequence;
[0055] (2) La 0.7 Sr 0.3 MnO 3 The target material and the substrate in step (1) are put into the pulsed laser deposition equipment;
[0056] (3) Carry out vacuum operation on the pulse laser deposition equipment to reach a high vacuum state of 1×10 -4 Pa, after the vacuum degree is reached, the substrate is heated, and the heating temperature is 730°C;
[0057] (4) The pulsed laser deposition equipment in the high vacuum state obtained in step (3) is subjected to a flow oxygen circulation operation, and the oxygen pressure is 1×10 -2 Pa;
[0058] (5) Depositing the pulsed laser deposition equipment in step (4), the laser pulse width is 10ns, the laser energy is 150mJ, and the laser frequency is 3Hz; the deposition time is 25min, and the thickness is 78nm. 0.7 Sr 0.3 MnO 3-δ film;
...
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