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Static crystallization device and preparation method of ultra-pure gallium

A technology of static crystallization and crystallization tank, which is applied in chemical instruments and methods, single crystal growth, crystal growth, etc. It can solve the problems of poor temperature reliability, high requirements for crystallization temperature control, and difficulty in ensuring high temperature uniformity in the crystallization device, etc. question

Inactive Publication Date: 2018-06-05
FIRST SEMICON MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, crystallization requires high temperature control, and temperature fluctuations will have a great impact on product purity. However, the temperature reliability of the currently used crystallization device is relatively poor, and it is difficult to ensure high temperature uniformity in the crystallization device.

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  • Static crystallization device and preparation method of ultra-pure gallium

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preparation example Construction

[0042] The present invention also provides a method for preparing ultra-high-purity gallium, comprising the following steps:

[0043] The seed crystal is placed on the seed crystal seat of the crystallization device, and the raw gallium melt is poured into the crystallization tank for crystallization to obtain ultra-high-purity gallium;

[0044] The crystallization device is the static crystallization device described above.

[0045] In the present invention, the raw gallium is preferably preheated to 35-37°C in a clean, anhydrous and oxygen-free oven, kept at a constant temperature for 8-15 hours, and then put into the crystallization tank, which can ensure the initial The temperature is uniform to avoid the formation of gallium crystal nuclei in a certain part.

[0046] In the present invention, the temperature of the surface of the gallium melt is preferably 29-32°C, more preferably 29.5-30.5°C, most preferably 30°C; controlling the surface temperature of the gallium melt ...

Embodiment 1

[0055] according to figure 1 Install the crystallization purification device, install the seed crystal seat (the internal seed crystal is 7N gallium), ensure that the seed crystal is at 24.5-26°C, and the temperature of the cooling circulating water tank is between 27-29.5°C for more than 4H, and then pour into the crystallization tank Add the initial gallium melt (purity 6N) that has been preheated in advance.

[0056] During the crystallization process, the temperature of the seed crystal is controlled to be 25±0.2°C, the temperature of the cooling circulating water tank is 27.5±0.2°C, and the temperature of the surface of the gallium melt is 30±0.5°C. After 120 hours of crystallization, the upper gallium tail liquid was scooped out, and the volume of gallium crystals was measured to be about 91.3% by weighing. Table 1 shows the steps of impurities.

Embodiment 2

[0058] according to figure 1 Install the crystallization purification device, install the seed crystal seat (the internal seed crystal is 7N gallium), ensure that the seed crystal is at 24.5-26°C, and the temperature of the cooling circulating water tank is between 27-29.5°C for more than 4H, and then pour into the crystallization tank Add the initial gallium melt (purity 6N) that has been preheated in advance.

[0059] During the crystallization process, the temperature of the seed crystal is controlled to be 25±0.2°C, the temperature of the cooling circulating water tank is 28±0.2°C, and the temperature of the surface of the gallium melt is 30±0.5°C. After 120 hours of crystallization, the upper gallium tail liquid was scooped out, and the volume of gallium crystals was measured to be about 86.7% by weighing. Table 1 shows the steps of impurities.

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Abstract

The invention provides a static crystallization device which comprises a cooling circulating water channel and a crystallization tank arranged in the cooling circulating water channel, wherein the crystallization tank comprises a tank body and a tank cover; an infrared temperature control device is arranged on the tank cover; a cavity is arranged at the bottom of the tank body, a seed crystal cupis arranged above the cavity; the cavity is provided with a water inlet and a water outlet, which are respectively connected with a seed crystal cooling circulating water inlet pipe and a seed crystalcooling circulating water outlet pipe, and a seed crystal temperature control thermocouple is arranged in the cavity; a water inlet is formed in the bottom of the cooling circulating water channel, and a water return hole is formed in the top end of the wall of the cooling circulating water channel. The structure of the static crystallization device and the design of the temperature control device can ensure high uniformly of gallium melt and seed crystal temperature in the crystallization tank, so as to ensure that the crystals grow in an almost plane manner from bottom to top, ensure uniform gradient distribution of the content of impurities, and obtain ultra-pure gallium products. The invention also provides a preparation method of the ultra-pure gallium.

Description

technical field [0001] The invention belongs to the field of high-purity scattered metal materials, and in particular relates to a static crystallization device and a preparation method of ultra-high-purity gallium. Background technique [0002] Ultra-high-purity gallium is an important raw material for the preparation of gallium arsenide semiconductors. Gallium arsenide crystals are mainly used to make integrated circuit substrates, infrared detectors, and gamma photon detectors. Semiconductor devices made of gallium arsenide have the advantages of high frequency, high temperature, low temperature performance, low noise, and strong radiation resistance. [0003] At present, the main preparation methods of high-purity gallium include electrolytic refining, fractional crystallization from supercooled liquid gallium, zone melting, directional solidification, single crystal pulling, vacuum distillation, etc. Among them, since the crystallization method has low energy consumpti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B29/02C30B11/00
CPCC30B11/003C30B11/006C30B29/02
Inventor 何志达谭继军朱刘
Owner FIRST SEMICON MATERIALS