The
continuous production device is characterized in that a
pH buffering agent
storage tank of the
continuous production device is sequentially connected with a
crystallization purification device through a pipeline, the
crystallization purification device is connected with a residue discharging tank, buffering tanks are arranged among the
crystallization purification device, a first mixing device and a second mixing device, and the second mixing device is connected with a waste liquid collecting tank; the solubilizer
storage tank is sequentially connected with the resin
tower, the
buffer tank, the filtering device and the first mixing device through pipelines; the resin
tower is provided with a resin inlet and a
solid waste
temporary storage tank, and a
buffer tank is arranged between the resin
tower and the first mixing device; a pipeline of the electronic-grade
phosphoric acid storage tank is sequentially connected with a dilute
phosphoric acid storage tank, a filtering device and a second mixing device; the top of the dilute
phosphoric acid storage tank is connected with the
ultrapure water storage tank, and a phosphoric
acid concentration detector is arranged in the dilute phosphoric acid storage tank; and the
etching inhibitor storage tank is sequentially connected with the purification device, the
buffer tank, the filtering device and the second mixing device through pipelines. The device deeply purifies the raw materials, improves the quality of the
etching liquid and reduces the production cost.