Manufacturing method of laser generator reflecting plate

Abstract

The invention discloses a manufacturing method of a laser generator reflecting plate. The manufacturing method comprises the steps of depositing a layer of nano-thickness pure chromium thin film on acopper matrix through physical vapor deposition under an inert gas shielding atmosphere; depositing a layer of micron-thickness pure chromium thin film on the pure chromium thin film through physicalvapor deposition; and finally preparing an aluminum oxide thin film on the surface of the pure chromium thin film as a reflecting layer through a reactive evaporation plating method, a multi-arc ion beam oxidation or anodic oxidation method and other method to complete manufacturing of the laser generator reflecting plate. By means of the manufacturing method, the manufacturing process is stable,and heat stress deformation of a workpiece is small. The laser generator reflecting plate prepared through the method is high in heat stability and excellent in optical performance. The laser reflectivity can reach up to 80-90%. The weakest interface bonding force of the prepared laser generator reflecting plate is higher than 500 MPa. The service life of the prepared laser generator reflecting plate reaches up to 2-4 years.

Description

technical field [0001] The invention belongs to the field of laser generator equipment, and relates to a manufacturing method of a laser generator reflecting mirror, in particular to a manufacturing method of a laser generator reflecting plate. Background technique [0002] Laser has the advantages of high energy density and excellent optical coherence, so it has a wide range of applications in industry, information, military and other fields. A large number of laser mirrors are needed in the process of laser generation from the resonant cavity of the generator to output. The laser reflection efficiency, thermal performance, microstructure, defects, and crystal orientation of the mirrors determine the power and service life of high-power lasers. Al2O3 has no absorption peak in the visible to infrared band, and has good mechanical and thermal properties, making Al2O3 thin film an ideal material for laser mirrors, and aluminum oxide film is used on the surface of copper to ens...

AI Technical Summary

Problems solved by technology

[0003] At present, the limitation of the process of plating aluminum oxide film on the surface of copper substrate leads to the insufficient bonding between the copper substrate and the aluminum oxide film, and the surface morphology and thickness of the aluminum oxide film are not completely controllable

These defects make the aluminum oxide film on the surface of the laser total reflection mirror prone to a decrease in reflectivity during service, and the reflective layer of the aluminum oxide film falls off from the copper substrate due to the absorption of photons and heating during service

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