Light path device suitable for pulse laser coating and pulse laser coating device of light path device

Abstract

The invention provides a light path device suitable for pulse laser coating and a pulse laser coating device of a light path device. A light path system (2) is included, pulse laser beams (21) generated by the light path system (2) form a scanning focusing light spot set (25) in a local zone of the surface of a target material (341). A scanning route of the scanning focusing light spot set (25) onthe surface of the target material (341) comprises straight line section routes (411) and arc section routes (412) which are sequentially and alternatively connected. The laser beams evenly scan thetarget material, the flatness of the surface of the target material is improved, the quality of a coating product is provided, and the service life of the target material is prolonged.

Description

technical field [0001] The present invention relates to the technical field of superconducting materials, more specifically, to an optical path device suitable for pulse laser coating and a pulse laser coating device thereof, especially to a second-generation high-temperature superconducting strip superconducting layer suitable for pulse laser Coating optical path device and its pulse laser coating device. Background technique [0002] Since the first discovery of superconductivity in the laboratory by Professor Camerin Onners of Leiden University in the Netherlands in 1911, superconducting materials and their applications have been one of the most active frontier research fields in contemporary science and technology. In the past ten years, the research on superconducting power devices based on superconductivity has developed rapidly. In superconducting energy storage, superconducting motors, superconducting cables, superconducting current limiters, superconducting transfor...

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Problems solved by technology

The reason is that pulsed laser deposition produces plasma instantaneously. Due to instantaneous evaporation, there is no preferential evaporation effect, and due to the axial confinement effect of instantaneous explosive expansion, the composition of the target material is basically the same as that of the film.

[0018] 2. Evaporation energy is high

At this time, the Yuhui shot again cannot be completely perpendicular to the target surface and the strip, so there will be some unevenness

[0035] The patent document US2005005846A1 proposes to use multiple targets and multiple laser beams from different lasers. Although it can speed up the deposition of coatings, it still has major limitations:

[0038] 3) The macroscopic pits on the surface of multiple targets are inconsistent, and the unevenness will be aggravated

If adjustment and optimization are not carried out, the sputtering efficiency of the pulse laser on the target will not reach the optimal range, and the energy of the pulse laser will be greatly wasted.

[0047] 3) For different targets, if the optical path is not optimized and adjusted according to its characteristics, the quality and efficiency of the sputtering coating process will be affected

[0052] 1) The coating process often needs to be carried out in a certain oxygen atmosphere, so the heating resistance wire has a short service life due to oxidation problems

[0053] 2) The heating and cooling speed of the resistance wire is relatively slow, and it is difficult to keep the temperature consistent

Although it can theoretically be used to heat the baseband, it also has great limitations:

[0055] 1) The high-frequency magnetic field will affect the surrounding equipment

[0056] 2) To make the heating uniform, it is necessary to make the magnetic field lines of each part of the workpiece cut more uniform, which is more difficult in the design

[0064] 1) If the tape running speed is fast and slow, there will be a large difference in the thickness of the film plated on the strip

[0065] 2) The heat capacity of the metal baseband is very small, and the stability and uniformity of the temperature field established by the radiation heating method in the deposition area will change due to the change of the airflow caused by the vibration of the baseband

[0073] 1) The focused pulsed laser beam also enters the coating cavity through a window, and the energy is lost again

[0074] 2) Due to the relative position of the chamber body wall and the target, it cannot be closer or further away, and the focus of the pulsed laser beam often makes some concessions

In order to meet this size, the purchase of the base material and the sale of the finished strip will inevitably cause a lot of waste due to the length deviation

[0078] 2) As the length of the production strip becomes longer, the volume of the equipment becomes larger, and the increase in the length of the production strip is not sustainable

[0079] 3) The strip must be at the same position in the deposition area. A slight movement of the strip in the lateral or longitudinal direction will cause a change in the thickness of the deposited film, which will lead to a decrease in the uniformity of the strip

[0097] 4. Utilization control of consumables

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