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a cr 2 Coating preparation method with controllable purity of alc phase

A technology of coating and purity, which is applied in the direction of coating, metal material coating process, vacuum evaporation plating, etc., can solve problems such as constraints and unknown purity of Cr2AlC phase, and achieve the effect of improving the limitation of temperature dependence

Active Publication Date: 2020-05-08
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, Cr in the coatings obtained by the above two preparation methods 2 The purity of the AlC phase is unknown, thus restricting the Cr 2 Exercising the Excellent Performance of AlC Phase

Method used

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  • a cr <sub>2</sub> Coating preparation method with controllable purity of alc phase
  • a cr <sub>2</sub> Coating preparation method with controllable purity of alc phase
  • a cr <sub>2</sub> Coating preparation method with controllable purity of alc phase

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] In the present embodiment, the preparation process of substrate surface coating is as follows:

[0026] (1) After cleaning and drying the substrate, put it into a vacuum coating chamber, pass argon gas with a flow rate of 100 sccm into the vacuum chamber, apply a negative bias voltage of -350V to the substrate to generate glow, and use the glow to etch the substrate for 40 minutes;

[0027] (2) Using Cr 2 Al target and pure Al target are co-sputtered, and the substrate is placed on Cr 2 The Al target rotates directly in front of it, and argon and hydrocarbon gas are introduced into the cavity as reaction gases, CH 4 Flow rate is 200sccm, Ar flow rate is 80sccm, air pressure is 4.0mTorr, Cr 2 The sputtering current of the Al target is 2.5A, the sputtering current of the Al target is 0.5A, and a coating containing three elements of Cr, Al, and C is deposited on the surface of the substrate, with a thickness of 5um;

[0028] (3) The deposited coating is subjected to vac...

Embodiment 2

[0032] In this embodiment, the substrate is the same as that in Embodiment 1. The preparation process of substrate surface coating is basically the same as that in Example 1, except that in step (2), Cr 2 The Al target sputtering current is 2.5A, and the Al target sputtering current is 1A.

[0033]Adopt EDS energy spectrum to measure chromium, aluminum element content in the coating that above-mentioned makes, obtain that Cr / Al ratio is 2.09 in this coating, as figure 1 shown.

[0034] Measure the XRD spectrum of the coating made above, such as figure 2 As shown, the phase composition and the content of each phase of the coating are obtained by performing multi-phase full-spectrum fitting on the XRD pattern without standard sample quantitative phase analysis, in which Cr 2 The mass percentage of AlC phase is 86.62%, and additionally contains 6.31 mass percentage of Al 8 Cr 5 Miscellaneous phase and 7.07% mass percent Cr 7 C 3 Miscellaneous phase, ie Cr 2 The purity of...

Embodiment 3

[0036] In this embodiment, the substrate is the same as that in Embodiment 1. The preparation process of substrate surface coating is basically the same as that in Example 1, except that in step (2), Cr 2 The Al target sputtering current is 2.5A, and the Al target sputtering current is 2A.

[0037] Adopt EDS energy spectrum to measure chromium, aluminum element content in the coating that above-mentioned makes, obtain that Cr / Al ratio is 1.56 in this coating, as figure 1 shown.

[0038] Measure the XRD spectrum of the coating made above, such as figure 2 As shown, the phase composition and the content of each phase of the coating are obtained by performing multi-phase full-spectrum fitting on the XRD pattern without standard sample quantitative phase analysis, in which Cr 2 The mass percentage of AlC phase is 74.11%, and additionally contains 22.31 mass percentage of Al 8 Cr 5 Miscellaneous phase and 3.58 mass percent Cr 7 C 3 Miscellaneous phase, ie Cr 2 The purity o...

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Abstract

The invention provides a preparation method of a Cr2AlC phase purity-adjustable coating. A magnetron sputtering technology is used; argon gas and hydrocarbon gas are introduced into a vacuum cavity; aCr2Al target and a pure Al target are used for common sputtering; a coating containing three element ingredients of Cr, Al and C is deposited onto the surface of a substrate subjected to cleaning treatment; then, the deposited coating is subjected to vacuum heat treatment to generate a Cr2AlC phase; the quality content of the Cr2AlC in the coating is regulated and controlled through controlling the sputtering current of the Cr2Al target and the Al target. When the sputtering current of the Cr2Al target is 2.0 A to 3.0A; the Al target current is 0.5A to 3.0A; the Cr2AlC phase purity can be higher than 65 percent; the realization of the Cr2AlC phase excellent performance is facilitated.

Description

technical field [0001] The invention relates to the technical field of surface coatings, in particular to a Cr 2 Coating preparation method with adjustable purity of AlC phase. Background technique [0002] MAX phase is a new type of ternary compound with layered structure, the chemical formula is M n+1 AX n , where M represents early transition metal elements; A refers to IIIA and IVA group elements; X is C or N elements; n is an integer from 1 to 6. The unique ternary layered structure of the MAX phase material makes it have both the excellent properties of metal and ceramics, such as the thermal conductivity, electrical conductivity, and mechanical processing characteristics of metal materials, as well as the low density, high elastic modulus, and high-temperature oxidation resistance of ceramic materials. In addition, MAX phase materials also have good high damage tolerance, good thermal shock resistance, etc., so they have potential wide application prospects in high...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/54C23C14/58C23C14/06
CPCC23C14/0036C23C14/0057C23C14/0635C23C14/352C23C14/548C23C14/5806
Inventor 柯培玲刘京周汪爱英王丽张栋
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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