The invention belongs to the field of
magneto-
optical film materials, and particularly relates to a high-phase-purity Ce-doped iron garnet
magneto-
optical film and a preparation method thereof. The method comprises the following steps: firstly, depositing a layer of YIG film with the thickness of 50-60 nm on a
silicon-based substrate as a seed layer through a film preparation process; then, an amorphous Ce: RIG film with the thickness of 10-15 nm is deposited on the YIG, and an amorphous YIG film with the thickness of 1-2 nm is continuously deposited on the amorphous Ce: RIG film; integrally annealing and crystallizing the two
layers of amorphous films; and finally, the
magneto-optical material film with the required thickness can be obtained by circulating the process of depositing the two
layers of amorphous films and integrally annealing and crystallizing. The multi-time deposition annealing magneto-
optical thin film material is used, the
phase purity of the Ce: RIG thin film and the Ce < 3 + > content in the thin film are improved, compared with a high-temperature deposition and multi-time deposition annealing process, the thermal budget is lower, substrate oxidation can be effectively avoided, the problems of precipitates and element valence states of the
silicon-based polycrystalline magneto-
optical thin film are solved, and the yield of the
silicon-based polycrystalline magneto-
optical thin film is improved. And the method has great significance in preparation of the Ce: RIG thin film with high
phase purity.