Method for preparing amorphous/amorphous nano multilayer film with improved plasticity

Abstract

The invention discloses a method for preparing an amorphous/amorphous nano multilayer film with improved plasticity. According to the method, a first amorphous layer is deposited by adopting a magnetron sputtering method, then a second amorphous layer is deposited on the first amorphous layer, and alternate depositing is carried out so as to form the amorphous/amorphous nano multi-layer film. Themethod has the advantages that the prepared multi-layer film is clear in interface, the multi-layer film with improved plasticity can be easily obtained by controlling the thickness of a single-layerfilm body, and therefore the possibility can be provided for preparing an amorphous/amorphous nano multi-layer film material with controllable mechanical property.

Description

technical field [0001] The invention belongs to the technical field of nanometer metal thin film materials, in particular to a method for preparing amorphous / amorphous nanometer multilayer thin films. Background technique [0002] Amorphous alloy, also known as metallic glass, is a new type of amorphous material synthesized by modern rapid solidification metallurgy technology and has the excellent properties of general metal and glass. The essential properties of materials are determined by the atomic structure and chemical bonds. Metallic glass is mainly composed of metal elements and metal bonds while maintaining a long-range disordered amorphous structure. This combination of "metal" and "glass" endows metallic glass with other materials Excellent properties that cannot be possessed, such as good toughness, opacity, etc. In addition, in a sense, the amorphous structure is defect-free and does not contain structural defects such as dislocations, twins and grain boundaries...

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Problems solved by technology

[0004] The existing methods to overcome the brittleness of amorphous alloys mainly include: (1) Using the size effect of amorphous alloys to reduce the sample size below a certain critical size, at this time, it is difficult to nucleate the shear band and the shear transition zone is difficult Gather into shear bands and show uniform plastic deformation, but this method generally needs to reduce the sample size to below 100 nanometers, so it is difficult to achieve

(2) Amorphous / crystalline multilayer film, the crystal can hinder the expansion of the shear band and make it shift to improve the plasticity of the amorphous alloy, but this method significantly reduces the essential properties of the amorphous alloy (such as long-range sequence)

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