Microwave power sensor based on solid support beam pressure-resistance effect

Abstract

The invention relates to a microwave power sensor based on a solid support beam pressure resistance effect, which comprises a high-resistance silicon substrate, a coplanar waveguide transmission lineand a fixed beam are arranged on the high resistance silicon substrate; the coplanar waveguide transmission line includes a CPW signal line and a CPW ground line, and a fixed support beam bridge pieris arranged between the CPW ground wire and the CPW signal line, the two ends of the fixed support beam are respectively fixed above the CPW signal line through a fixed support beam bridge pier, two ends of the fixed support beam are connected with the high-resistance silicon substrate through a fixed support beam bridge pier, and right above the CPW signal line, the upper surface and lower surfaces of the fixed support beam is provided with a metal mass block. When the microwave power sensor is working, the deformation of the fixed beam causes the surface stress of the fixed beam to change, and the value of the diffusion resistance changes. The voltage change between the nodes is measured by the Huygens bridge method. The microwave power value can be directly measured. The microwave powersensor has the advantages of novel structure, easy integration, wide measurement range and high measurement precision.

Description

technical field [0001] The invention relates to the technical field of micro-electromechanical systems, in particular to a microwave power sensor based on the piezoresistive effect of a fixed beam. Background technique [0002] In the research of radio frequency microelectromechanical systems (RF MEMS), the power of microwave signals is an important parameter to characterize microwave signals. The detection of microwave power is applied to the generation, transmission and reception of microwave signals. The most common microwave signal power sensor is a capacitive microwave power sensor based on a fixed beam structure, such as a MEMS fixed beam online microwave power sensor and its Preparation method (patent number: 201010223810.5), microwave detection system and detection method based on fixed beam and direct power sensor (patent number: 201310027303.8). The working principle of this type of microwave power sensor is: when the microwave signal passes through the coplanar w...

AI Technical Summary

Problems solved by technology

However, the output of the capacitive microwave power sensor is nonlinear, its parasitic capacitance and distributed capacitance have a great influence on the sensitivity and measurement accuracy, the connection circuit is more complicated, and the pull-down range of the fixed beam is small.

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