Design method of efficient photocathode based on n-type monocrystal Si
A design method and photocathode technology, which are applied in the manufacture of light-emitting cathodes, photo-emission cathodes, main electrodes of discharge tubes, etc., can solve problems such as unfavorable photoelectric conversion efficiency of Si photocathodes, and achieve long service life, improved photocurrent density, and stable Sex-enhancing effects
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[0023] Design of High Efficiency Photocathode Based on n-type Single Crystal Si
[0024] S1. get the n-type single-crystal Si slice that size is 2 inches, adopt 3L mass percent concentration to be that the potassium hydroxide solution of 2% carries out texturing to the positive and negative sides of n-type single-crystal Si slice, through and in the texturing process The temperature controller connected to the heater controls the temperature at 80° C., controls the reaction time at 30 minutes, and cleans the textured surface.
[0025] S2. Using high temperature annealing method in the annealing furnace at p + The emitter is doped with boron element, in n + Phosphorus is doped on the emitter, specifically: by spin-coating a colloidal solution containing boron and phosphorus, and then heating to achieve doping, the colloidal solution is purchased from Futurrex, the specific model is: boron BDC1-2500, phosphorus PDC5-2500, annealed The temperature is 950°C, the annealing time i...
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