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Preparation method of titanium evaporation material and titanium evaporation material

A cutting and raw material technology, applied in vacuum evaporation plating, metal material coating process, coating and other directions, can solve the problems of complex manufacturing process, low product qualification rate, low purity and cleanliness of titanium evaporation material, etc. The effect of simple process, high product qualification rate, and easy production control

Active Publication Date: 2020-11-06
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The first object of the present invention is to provide a preparation method of titanium evaporation material to alleviate the technical problems in the prior art that the purity and cleanliness of titanium evaporation material are not high, the manufacturing process is complicated, and the product qualification rate is low

Method used

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  • Preparation method of titanium evaporation material and titanium evaporation material
  • Preparation method of titanium evaporation material and titanium evaporation material

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preparation example Construction

[0038] According to a first aspect of the present invention, a method for preparing a titanium evaporation material is provided, comprising the steps of:

[0039] (a) pretreating raw material titanium;

[0040] (b) ultrasonically oscillate the pretreated titanium in cleaning oil for 10-20min; then ultrasonically oscillate in a steam drying system for 5-15min; then pickle for 3-6min; then ultrasonically oscillate in water for 5-10min; then dry ;

[0041] (c) putting the titanium obtained in step (b) into a centrifugal grinder, adding detergent and water for centrifugal grinding;

[0042] The dosage of the detergent is 30-50mL, the grinding speed is 180-200r / min, and the grinding time is 10-20min;

[0043] (d) post-processing the titanium obtained in step (c) to obtain titanium evaporation material.

[0044] The high-purity titanium evaporation material meeting the requirements was obtained through pretreatment, pickling, centrifugal grinding and post-treatment of titanium. ...

Embodiment 1

[0109] like figure 1 As shown, the present embodiment provides a method for preparing a titanium evaporation material, comprising the following steps:

[0110] (a) Pretreating raw titanium;

[0111] (b) ultrasonically oscillate the pretreated titanium in cleaning oil for 10 min; then ultrasonically oscillate in a steam drying system for 15 min; then pickle for 3 min; then ultrasonically oscillate in water for 10 min; then dry;

[0112] (c) putting the titanium obtained in step (b) into a centrifugal grinder, adding detergent and water for centrifugal grinding;

[0113] The amount of the cleaning agent is 30-50mL, the grinding speed is 180r / min, and the grinding time is 20min;

[0114] (d) post-processing the titanium obtained in step (c) to obtain titanium evaporation material.

Embodiment 2

[0116] like figure 1 As shown, the present embodiment provides a method for preparing a titanium evaporation material, comprising the following steps:

[0117](a) pretreating raw material titanium;

[0118] (b) ultrasonically oscillate the pretreated titanium in cleaning oil for 20 minutes; then ultrasonically oscillate in a steam drying system for 5 minutes; then pickle for 6 minutes; then ultrasonically oscillate in water for 5 minutes; then dry;

[0119] (c) putting the titanium obtained in step (b) into a centrifugal grinder, adding detergent and water for centrifugal grinding;

[0120] The detergent consumption is 50mL, the grinding speed is 200r / min, and the grinding time is 10min;

[0121] (d) post-processing the titanium obtained in step (c) to obtain titanium evaporation material.

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Abstract

The invention belongs to the technical field of evaporation materials for vacuum evaporation coating and particularly relates to a titanium evaporation material and a preparation method thereof. The preparation method comprises the steps of (a) pretreating raw titanium; (b) subjecting the pretreated titanium to ultrasonic vibration in washing oil for 10-20 min; performing ultrasonic vibration in avapor drying system for 5-15 min; pickling for 3-6 min; performing ultrasonic vibration in water for 5-10 min; drying; (c) adding the titanium of step (b) into a centrifugal grinder, adding a cleaning agent and water, and centrifugally grinding, wherein usage of the cleaning agent is 30-50 mL, grinding speed is 180-200 r / min, and grinding time is 10-20 min; (d) post-treating the titanium of step(c) to obtain the titanium evaporation material. The preparation method has simple process and is easy to industrialize, production management is easy, the titanium evaporation material prepared herein has high cleanliness and purity and has titanium content of 99.999% to 99.9999%, and product qualification ratio is 50-60%.

Description

technical field [0001] The invention relates to the technical field of evaporation material for vacuum evaporation coating, in particular to a preparation method of titanium evaporation material and the titanium evaporation material. Background technique [0002] Vacuum coating materials for semiconductor integrated circuits are indispensable raw materials for the wafer back gold process, and titanium evaporation materials are important supporting materials in the manufacture of semiconductor electronic devices. With the rapid development of my country's integrated circuit industry, the use of this evaporation coating material The consumption is increasing year by year, and the market is vast. As the integration of integrated circuits is getting higher and higher, and the width of interconnection lines is decreasing, the purity and impurity content of titanium directly affect the performance of electronic thin films. Therefore, it is necessary to ensure the high purity and cl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C22B34/12C23C14/24
CPCC22B34/1295C23C14/24
Inventor 姚力军潘杰王学泽杨恕鉴
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD