Optical detection device and detection method for hybrid integrated circuit component defects
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- CHINA ELECTRONIC TECH GRP CORP NO 38 RES INST
- Publication Date
- 2021-01-29
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Abstract
Description
technical field
[0001] The invention relates to the technical field of optical detection, and more specifically to an optical detection device and a detection method for hybrid integrated circuit component defects. Background technique
[0002] Microwave multi-chip module technology (Multi-Chip Module) is to directly install the bare integrated circuit chip on the multi-layer high-density interconnection substrate, and the metal wires of the layers are connected by via holes. This assembly method allows the chip to be very close to the chip, which can reduce the signal delay, crosstalk noise, and inductive / capacitive coupling problems generated in interconnection and wiring. Through this assembly method, the integrated circuit is greatly reduced in size and weight.
[0003] Since the optical inspection equipment used in the surface mount process (Surface Mount Technology) in the past can only be used to detect some standard surface mount components such as standard resistor...