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Preparation method of ultraviolet detector based on ZnO micro-wire array embedded in flexible substrate

A technology of ultraviolet detector and flexible substrate, which is applied in the field of ultraviolet light detection, can solve the problems of low crystal quality, low synthesis temperature, difficult to control the shape of zinc oxide film, etc., and achieve good flexibility, simple operation, and small bending radius Effect

Active Publication Date: 2018-11-13
SOUTH CHINA NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The advantage of the sol-gel method is that the synthesis temperature is low and the operation is simple, but the morphology of the synthesized zinc oxide film is not easy to control, and the crystal quality is low.

Method used

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  • Preparation method of ultraviolet detector based on ZnO micro-wire array embedded in flexible substrate
  • Preparation method of ultraviolet detector based on ZnO micro-wire array embedded in flexible substrate
  • Preparation method of ultraviolet detector based on ZnO micro-wire array embedded in flexible substrate

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Embodiment 1

[0031] This embodiment provides a method for preparing a ZnO micron line array ultraviolet detector embedded in a flexible substrate, the method comprising the following steps:

[0032] S1. Carry out cleaning and drying pretreatment on the quartz test tube and the quartz boat, and use distilled water, acetone, and ethanol to perform ultrasonic cleaning on the quartz test tube and the quartz boat respectively, and dry them for use;

[0033] S2. Take 5 grams of zinc powder with a purity of 99.99%, evenly spread it on the bottom of the cleaned quartz boat and place the quartz boat in the quartz test tube, and place the quartz test tube in the high temperature area in the middle of the tube furnace;

[0034] S3. Raise the temperature of the tube furnace to 980 °C at a heating rate of 10 °C / min, and continuously feed high-purity nitrogen at a flow rate of 15 ml / min as a protective gas during the heating process of the tube furnace. When the temperature of the tube furnace reaches th...

Embodiment 2

[0041]This embodiment provides a method for preparing a ZnO micron line array ultraviolet detector embedded in a flexible substrate. The experimental conditions are the same as in Embodiment 1, except that in step S2, 7 grams of zinc powder with a purity of 99.99% is weighed, and step S3 In this process, the tube furnace is heated up to 1000 °C at a heating rate of 15 °C / min, and high-purity nitrogen is continuously fed into the tube furnace at a flow rate of 20 ml / min as a protective gas during the heating process. When the tube furnace is heated to this temperature , stop feeding nitrogen, and start feeding high-purity oxygen at a flow rate of 20ml / min, and keep the temperature for 1.5h; in step S6, after dropping 1ml of PVAL glue to cover the surface of the zinc oxide micron wire array, put it in a drying oven at 65°C The box is kept for 1.5h.

Embodiment 3

[0043] This embodiment provides a method for preparing a ZnO micron line array ultraviolet detector embedded in a flexible substrate. The experimental conditions are the same as in Embodiment 1, except that in step S2, 10 grams of zinc powder with a purity of 99.99% is weighed, and step S3 In the process, the tube furnace was heated up to 990 °C at a heating rate of 13 °C / min, and high-purity nitrogen was continuously fed in at a flow rate of 17 ml / min as a protective gas during the heating process of the tube furnace. , stop feeding nitrogen, and start feeding high-purity oxygen at a flow rate of 17ml / min, and keep the temperature for 1.3h; in step S6, after dropping 1.5ml of PVAL glue to cover the surface of the zinc oxide micron wire array, put it in a 63°C Keep in the drying box for 1.3h.

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Abstract

The invention discloses a preparation method of an ultraviolet detector based on a ZnO micro-wire array embedded in a flexible substrate. The method comprises the following steps: preparing ZnO micro-wires from zinc powder evenly placed on a quartz boat and a quartz tube as raw materials with a chemical vapor deposition method; then, transferring the prepared ZnO micro-wires to a cleaned glass substrate, arranging the micro-wires orderly, adding dropwise PVAL glue to cover surfaces of the ZnO micro-wires, and removing the ZnO micro-wires and a PVAL substrate from the glass substrate after theglue is solidified to complete embedding of an ZnO micro-wire array into the flexible substrate; next, depositing gold interdigital electrodes on the surface of the ZnO micro-wire array to complete preparation of the ultraviolet detector based on the ZnO micro-wire array. According to the method, the PVAL flexible substrate is used, and the ZnO micro-wire array can be protected to the greatest extent and forms the best contact with the electrodes, so that the detector is highly integrated.

Description

technical field [0001] The invention relates to the field of ultraviolet light detection, in particular to a method for preparing a ZnO micron line array ultraviolet detector embedded in a flexible substrate for wearable devices. Background technique [0002] With the popularity of smart terminals, wearable electronic devices have a huge market prospect. Flexible wearable detectors have the characteristics of portability, lightness, excellent photoelectric performance, and high integration of devices. Ultraviolet light detection technology is widely used in space communication, ultraviolet interference, ultraviolet guidance, environmental pollution detection, biomedical analysis and other fields. Human eyes or surface skin tissue exposed to a certain intensity of ultraviolet light will cause varying degrees of damage, and it is also an important cause of human skin cancer. Therefore, flexible and wearable ultraviolet detection equipment for ultraviolet light detection has ...

Claims

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Application Information

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IPC IPC(8): H01L31/0296H01L31/18C01G9/03
CPCC01G9/03H01L31/0296H01L31/18Y02P70/50
Inventor 宿世臣孙新雨
Owner SOUTH CHINA NORMAL UNIVERSITY
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