Method and system for achieving resonant frequency tuning of miniature cantilever beam through photothermal effect, and application

A technology of micro-cantilever beam and resonance frequency, which is applied in the measurement of resonance frequency, instruments, measuring devices, etc., can solve the problem of undetected micro-cantilever beam frequency domain response, not realizing the tuning of the micro-cantilever beam resonance frequency, and difficult to realize the measurement of vibration signal frequency and other problems, to achieve the effect of high cost performance, expansion of application bandwidth, and long service life

Inactive Publication Date: 2018-12-11
SHANDONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in this patent, the resonant excitation of the micro-cantilever probe is only realized by applying pulsed laser irradiation with a certain frequency, and the frequency-domain response of the micro-cantilever is not detected, nor is the tuning of the resonant frequency of the micro-cantilever beam achieved. Measurement of frequencies of vibration signals over a wide frequency range

Method used

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  • Method and system for achieving resonant frequency tuning of miniature cantilever beam through photothermal effect, and application
  • Method and system for achieving resonant frequency tuning of miniature cantilever beam through photothermal effect, and application
  • Method and system for achieving resonant frequency tuning of miniature cantilever beam through photothermal effect, and application

Examples

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Effect test

Embodiment 1

[0064] A method for tuning the resonant frequency of a micro-cantilever beam using the photothermal effect. The micro-cantilever beam 3 has a length of 350 μm, a width of 35 μm, and a thickness of 1 μm, including the following steps:

[0065] (1) Irradiate the surface of the micro-cantilever 3 by modulating the laser to excite its vibration; when the laser is irradiated on the surface of the micro-cantilever 3, a temperature gradient will be generated in the thickness direction and cause it to bend. When the laser is modulated, it will make the micro-cantilever 3 The cantilever beam 3 generates periodic vibrations. The wavelength of the modulated laser is 450nm.

[0066] (2) Irradiating the surface of the micro-cantilever 3 with a continuous laser beam generates a thermal effect on the surface of the micro-cantilever 3 , and tunes its resonant frequency by controlling the power of the continuous laser; the thermal effect of the laser can expand the lattice of the micro-cantile...

Embodiment 2

[0074] An implementation system of a method for realizing the resonance frequency tuning of a micro-cantilever beam using the photothermal effect, such as figure 1 As shown, including excitation module, measurement module and heating module;

[0075] The excitation module is used to: irradiate the surface of the micro-cantilever 3 by modulating the laser to excite its vibration; the heating module is used to: irradiate the surface of the micro-cantilever 3 with a continuous laser to generate a thermal effect on the surface of the micro-cantilever 3 , and control the power tuning of the continuous laser Its resonant frequency; the measuring module is used for collecting and processing the vibration signal of the micro-cantilever beam 3 .

[0076] The excitation module includes a computer 8, a lock-in amplifier 5, and a modulation laser 4 connected in sequence; the internal single reference mode of the lock-in amplifier 5 is controlled by the computer 8 to output a sinusoidal os...

Embodiment 3

[0081] The application of the method of utilizing the photothermal effect to realize the resonance frequency tuning of the micro-cantilever described in Example 1 includes utilizing the characteristics of the micro-cantilever 3 with high sensitivity and fast response speed, and through the interaction with the external physical quantity, the energy of the physical quantity is converted into a cantilever The kinetic energy of the beam can detect the frequency of physical quantities according to the vibration frequency of the cantilever beam. The external physical quantities include acoustic wave signals, modulated light signals, alternating current signals and other modulated signals.

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Abstract

The invention relates to a method and system for achieving the resonant frequency tuning of a miniature cantilever beam through a photothermal effect, and an application. The method comprises the following steps: (1), illuminating the surface of the miniature cantilever beam by modulating the laser to excite the vibration of the miniature cantilever beam; (2), illuminating the surface of the miniature cantilever beam by continuous laser irradiation, generating a thermal effect on the surface of the miniature cantilever beam, and tuning the resonant frequency by controlling the power of the continuous laser; (3), collecting and processing a vibration signal of the miniature cantilever beam. The method can realize the continuous tuning of the resonant frequency of the miniature cantilever beam. Compared with a mode of increasing the frequency bandwidth, the method expands the application bandwidth of the miniature cantilever beam, and the higher the resonance order of the miniature cantilever beam is, the larger the frequency tuning range thereof is. The system can be used as a detector for detecting vibration frequencies. Since the miniature cantilever beam can convert the energy ofa physical quantity into the kinetic energy of the beam by interacting with the external physical quantity with a certain frequency, the detection of the physical quantity frequency is realized according to the vibration frequency of the beam.

Description

technical field [0001] The invention relates to a method for realizing resonance frequency tuning of a micro-cantilever beam by using photothermal effect, a realization system and an application, and belongs to the technical field of micro-electromechanical device sensors. Background technique [0002] As a microsensor commonly used in microelectromechanical systems (MEMS), microcantilever beams have the advantages of low cost, light weight, low power consumption, small size, high sensitivity, fast response speed, and batch production. Biochemical field, environmental monitoring and many other fields have a wide range of applications. [0003] Utilizing the characteristics of high sensitivity and fast response of the micro-cantilever, the energy of the physical quantity can be converted into the kinetic energy of the micro-cantilever through the interaction with the external physical quantity (sound wave, pulse light, etc.) with a specific frequency. At this time, the micro-...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H13/00
CPCG01H13/00
Inventor 刘铎高乃坤罗雯耀
Owner SHANDONG UNIV
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