Heating method of electronic grade hydrofluoric acid distillation system

A technology of electronic grade hydrofluoric acid and distillation system, which is applied in the heating field of electronic grade hydrofluoric acid distillation system, can solve the problems of high temperature of steam condensed water, large temperature difference between heat medium and medium, and difficult control, so as to achieve circulation Effects of utilization, waste reduction, and ease of control

Active Publication Date: 2018-12-18
浙江森田新材料有限公司
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AI Technical Summary

Problems solved by technology

Since the boiling point of hydrofluoric acid is relatively low, only 19.5°C under normal pressure, using steam heating, the temperature difference between the heat medium and the medium is large, which is not easy to control; and the temperature of steam condensate after heat exchange is high, resulting in energy waste

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  • Heating method of electronic grade hydrofluoric acid distillation system
  • Heating method of electronic grade hydrofluoric acid distillation system
  • Heating method of electronic grade hydrofluoric acid distillation system

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Embodiment Construction

[0036] Such as Figure 1 to Figure 5 Shown, be the heating method of a kind of electronic grade hydrofluoric acid distillation system of the present invention, comprise the following steps:

[0037] a. First, the ordinary hydrogen fluoride solution is continuously passed into the distillation inner tank 15 through the liquid inlet port 18 on the distillation tower 1, and the distillation inner tank 15 is fixedly connected in the first tower body 14 through the limit plate 17, so that the ordinary hydrogen fluoride solution is The distance between the liquid level in the distillation liner 15 and the top of the distillation liner 15 is 20-30 cm, stop feeding the common hydrogen fluoride solution;

[0038]Limiting plate 17 is provided with limit card groove 27, the cross section of limit card groove 27 and the cross section of distillation liner 15 are cross-shaped structure, distillation liner 15 matches limit card groove 27, limit plate 17 can fix the distillation liner 15 in...

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Abstract

The invention discloses a heating method of an electronic grade hydrofluoric acid distillation system. The method includes the steps of: introducing an ordinary hydrofluoric acid into a distillation liner, then conducting water bath heating distillation, cooling the formed steam by a condenser and a cooler to form liquid, letting the liquid flow into a collecting tank for collection uniformly, letting the cooled water and distilled water flow back to a heating control tower again through a first return pipe and a second return pipe, and carrying out the next batch distillation of ordinary hydrofluoric acid solution. The heating method provided by the invention has simple steps, not only can reduce the temperature difference between a heating medium and a medium, is easy to control, but also lowers the temperature of steam condensate after heat exchange, reduces the waste of energy and decreases the steam consumption by 20%.

Description

technical field [0001] The invention relates to a heating method for an electronic grade hydrofluoric acid distillation system. Background technique [0002] Electronic grade hydrogen fluoride (DHF) is one of the main chemical raw materials for the production of integrated circuits, chips, and photovoltaic cells. It can be used for cleaning and etching, as well as analytical reagents and preparation of high-purity fluorine-containing chemicals, and the market demand is huge . The production of electronic grade hydrofluoric acid, on the one hand, can greatly increase the added value of basic chemical raw material anhydrous hydrogen fluoride, on the other hand, it can also replace imported products, especially high-purity hydrofluoric acid (PPT level), to ensure the foundation of integrated circuit development Materials are not subject to foreign restrictions. [0003] Electronic grade hydrofluoric acid has very high requirements on the purity of the product, and the concent...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D3/00
CPCB01D3/00
Inventor 潘美华朱博超陈志建胡伟民
Owner 浙江森田新材料有限公司
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