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Preparation method of anti-oxidizing coating

A technology of anti-oxidation coating and silicon carbide layer, which is applied in the direction of coating, metal material coating process, gaseous chemical plating, etc., can solve the problem of crack-prone hydrogen chloride inhibition, multi-layer SiC coating gap increase, deposition Conditions are not easy to control and other problems, to achieve the effect of overcoming poor high temperature oxidation resistance, avoiding cracks and partial shedding, and improving high temperature oxidation resistance

Active Publication Date: 2018-12-18
AEROSPACE INST OF ADVANCED MATERIALS & PROCESSING TECH
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  • Abstract
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Problems solved by technology

The thickness of the multilayer SiC coating prepared by these two methods is only 40 μm or 50 μm. When it is necessary to prepare a thicker SiC coating, it takes longer preparation time, and it may be unavoidable as the preparation thickness increases. There is the problem of increasing the gap between multi-layer SiC coatings or it may be unavoidable with the increase of preparation time. There is a large thermal stress of the coating prepared by long-term deposition, cracks are easy to occur under thermal shock, and the inhibitory effect of hydrogen chloride is obvious. The deposition speed Lower and lower, deposition conditions are not easy to control

Method used

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  • Preparation method of anti-oxidizing coating

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preparation example Construction

[0028] The invention provides a kind of preparation method of anti-oxidation coating, described method comprises the steps:

[0029] (1) Place the base material in a deposition reaction chamber (such as a deposition furnace), for example, cut the base material into samples of different specifications and shapes (for example, a flat sample with a length of 100 mm, a width of 100 mm, and a height of 5 mm or An outer diameter of 60mm, an inner diameter of 30mm and a ring sample of 10mm in height), and then the sample is supported in a deposition furnace (CVD furnace);

[0030] (2) Adjust the temperature in the deposition reaction chamber to 1000-1200°C (for example, 1000°C, 1020°C, 1050°C, 1080°C, 1100°C, 1120°C, 1150°C, 1180°C or 1200°C), and make the The deposition reaction chamber is kept warm under the condition that the degree of vacuum is 1-3kPa (for example, 1, 1.5, 2, 2.5 or 3kPa);

[0031] (3) Introduce silicon carbide source gas into the deposition reaction chamber (fo...

Embodiment 1

[0061] Put a C / SiC composite flat sample with a length of 100mm, a width of 100mm and a height of 10mm (100*100*10mm) into a deposition furnace (CVD furnace); raise the temperature of the deposition furnace to 1020°C, Insulation under a negative pressure of 3kPa; under the stable conditions of a temperature of 1020°C (deposition temperature) and a negative pressure of 3kPa (deposition pressure) in the deposition furnace, the SiC source gas is introduced to deposit the SiC layer three times, and the deposition time of each layer is After 4 hours, the SiC / SiC / SiC anti-oxidation coating was finally obtained; wherein, the silicon carbide source gas contained trichloromethylsilane, argon and hydrogen; the flow rate of the argon was 0.6m 3 / h, the flow rate of the hydrogen is 0.1m 3 / h, the mol ratio of the hydrogen to the trichloromethylsilane is 11:1.

[0062] Perform performance test on the sample prepared with anti-oxidation coating in this embodiment: perform SEM characterizat...

Embodiment 2

[0064] Put a 100mm long, 100mm wide and 5mm high (100*100*5mm) C / SiC composite flat sample into the CVD furnace; raise the temperature of the deposition furnace to 1050°C, Insulation under the state; under the stable conditions of temperature of 1050 ℃ and negative pressure of 2kPa in the deposition furnace, the SiC source gas was introduced, and the SiC layer was deposited three times, and the deposition time of each layer was 4 hours, and finally the SiC / SiC / SiC resist Oxide coating; wherein, the silicon carbide source gas contains trichloromethylsilane, argon and hydrogen; the flow rate of the argon is 0.8m 3 / h, the flow rate of the hydrogen is 0.15m 3 / h, the mol ratio of the hydrogen to the trichloromethylsilane is 13:1.

[0065]Perform performance test on the sample prepared with anti-oxidation coating in this embodiment: perform SEM characterization on the sample with anti-oxidation coating prepared in this embodiment, and obtain the anti-oxidation coating prepared in...

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Abstract

The invention relates to a preparation method of an anti-oxidizing coating, wherein the method includes: (1) placing a substrate in a deposition reaction chamber; (2) heating the deposition reaction chamber to 1000-1200 DEG C and maintaining the temperature under vacuum degree of 1-3 kPa; (3) feeding a SiC source gas to deposit a layer of SiC on the surface of the substrate through a CVD process at 1000-1200 DEG C under a negative pressure of 1-3 kPa; (4) cooling the deposition reaction chamber to lower than 800 DEG C under protection of inert gas; (5) on the basis of the formed SiC layer, successively repeating the steps (2) to (4) to deposit the next one SiC layer until the predetermined number of the layers, thus forming the anti-oxidizing coating. In the method, a large thickness compact anti-oxidizing coating is formed on the surface of the substrate through multi-time deposition in a short time. The coating is free of cracks and can significantly improve the high-temperature anti-oxidizing performance of the substrate.

Description

technical field [0001] The invention belongs to the technical field of anti-oxidation coatings, in particular to a preparation method of anti-oxidation coatings. Background technique [0002] Carbon / carbon composites and carbon fiber reinforced ceramic matrix composites combine the excellent high-temperature performance of carbon fibers and the high-temperature thermodynamic properties of the matrix, and are widely used in high-temperature environments. However, a large amount of carbon fibers and carbon in the matrix in fiber-reinforced carbon-based or ceramic-based composite materials are prone to high-temperature oxidation reactions, which make the material properties invalid, and greatly limit the use of composite materials in high-temperature aerobic environments. Therefore, the antioxidant protection of composite materials is the key to its wide application. [0003] The preparation of anti-oxidation coatings on the outside of composite components to block the erosion...

Claims

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Application Information

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IPC IPC(8): C04B41/87C23C16/32
CPCC23C16/325C04B41/009C04B41/5059C04B41/87C04B35/22C04B35/83C04B41/4531C04B41/52
Inventor 王涛裴雨辰刘俊鹏孙同臣于新民李晓东霍鹏飞
Owner AEROSPACE INST OF ADVANCED MATERIALS & PROCESSING TECH
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