Ultra-hard W-Cr-Al-Ti-N nano gradient multilayer film material and preparation method thereof

An al-ti-si, multi-layer film technology, applied in the field of metal surface coating, can solve the problems of low hardness, poor coating toughness, weak film-base bonding force, etc., to improve the hardness and improve the film-base bonding force. Effect
CN109097743AActive Publication Date: 2018-12-28YANTAI UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
YANTAI UNIV
Publication Date
2018-12-28

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Abstract

The invention provides an ultra-hard W-Cr-Al-Ti-N nano gradient multilayer film material and a preparation method thereof. Multi-arc ion plating technology is adopted in the preparation method, a tungsten element is introduced into a multilayer film, and NH3 and N2 are adopted as reaction gases together to prepare the nano gradient multilayer film material, so that the bonding force between film layers is strengthened, and the hardness of the film layers is greatly improved.
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Description

technical field

[0001] The invention belongs to the technical field of metal surface coatings, and in particular relates to a W-Cr-Al-Ti-N nanometer gradient multilayer film material. Background technique

[0002] Vapor deposition technology is an important method for preparing coatings, mainly including CVD (chemical vapor deposition) and PVD (physical vapor deposition), which is the most active research field in contemporary vacuum technology and material science, and is also the mainstream of tool surface coating technology at present. direction, it can not only be used to prepare thin film coatings with various special properties, but also can be used to prepare various functional thin film materials and decorative thin film coatings and to deposit various compounds, nonmetals, semiconductors, ceramics, plastics film etc. Compared with CVD technology, PVD technology has the advantages of deposition temperature; fast deposition rate; the deposited coating has a fine stru...

Claims

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