A groove-type anode fast recovery diode with bipolar Schottky control and a manufacturing method thereof
A recovery diode, groove type technology, used in diodes, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problem of excessively high oscillating current and voltage, long reverse recovery time, increasing system circuit power consumption and limiting system operating frequency and other problems, to achieve the effect of easy passage and reduction of reverse recovery time
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[0035] Below in conjunction with accompanying drawing, the present invention is described in detail:
[0036] A notched anode fast recovery diode with bipolar Schottky control such as figure 2 As shown, it includes: a cathode metal 1 with an N-type intrinsic region 4 above the cathode metal 1 and an anode metal 7 above the N-type intrinsic region 4. It is characterized in that a lightly doped The hetero-doped N-type region 3 and the heavily doped N-type region 2, the lightly doped N-type region 3 and the heavily doped N-type region 2 are arranged at intervals, the bottom of the lightly doped N-type region 3 is connected to the cathode metal 1 It is a Schottky contact 8, and the lightly doped N-type region 3 extends toward the N-type intrinsic region 4 and makes the heavily doped N-type region 2 covered by the extension of the lightly doped N-type region 3 , the N-type intrinsic region 4 is located on the upper surface of the extension of the lightly doped N-type region 3; be...
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