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Condensation plate, vacuum drying equipment and vacuum drying method

A vacuum drying equipment and vacuum drying technology, applied in the fields of vacuum drying, vacuum drying equipment, and condensation plates, can solve the problems of unfavorable narrow frame realization and other problems, and achieve the effect of good uniformity of film morphology

Active Publication Date: 2021-01-08
BOE TECH GRP CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But this method is not conducive to the realization of narrow borders

Method used

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  • Condensation plate, vacuum drying equipment and vacuum drying method
  • Condensation plate, vacuum drying equipment and vacuum drying method

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Embodiment Construction

[0041] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0042] As an aspect of the present invention, a kind of condensing plate 20 is provided, such as figure 2 As shown, the condensation plate 20 is used to be arranged opposite to the substrate 13 to be dried in the film layer drying process (for example, a vacuum drying process), so that the solvent on the substrate 13 to be dried evaporates and condenses on the condensation plate 20 to form a condensation layer 15. The condensation plate 20 includes a body 21 on which a solvent storage structure 22 is arranged. The solvent storage structure 22 is used to store a solvent which is used to form gas after evaporation and release toward the substrate to be dried.

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Abstract

The invention provides a condensation plate, which is used to be arranged opposite to the substrate to be dried in the film layer drying process, so that the solvent on the substrate to be dried evaporates and condenses on the condensation plate, the condensation plate includes a body, the The main body is provided with a solvent storage structure, the solvent storage structure is used to store the solvent, the solvent is used to form gas after evaporation, and release toward the substrate to be dried. Correspondingly, the present invention also provides a vacuum drying device and a vacuum drying method. Improve the uniformity of the film layer formed in the vacuum drying process and reduce the impact on the frame width.

Description

technical field [0001] The invention relates to the field of manufacturing display devices, in particular to a condensation plate, vacuum drying equipment and a vacuum drying method. Background technique [0002] The film-forming methods of organic light-emitting diode (OLED) mainly include evaporation process and solution process. The inkjet printing technology in the solution process is considered to be an important way to achieve mass production of large-sized organic electroluminescent devices due to its high material utilization rate and large-scale size. [0003] The current inkjet printing process includes an inkjet printing (IJP) process, a vacuum drying process, and a baking (Bake) process. Among them, in the vacuum drying process, the drying speed of ink droplets on the substrate to be dried has an important impact on the final morphology of the film, and the uniformity of film thickness has an important impact on the life and efficiency of OLED devices. Therefore...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D53/00B01D5/00F26B3/20F26B5/04H10K99/00
CPCB01D5/0015B01D53/002F26B3/20F26B5/04H10K71/40B01D5/00B01D53/00B41J2/01H05B33/00F26B5/06F26B25/00B41J11/002B41M7/009B41M7/00H10K71/135H10K71/00
Inventor 王辉锋
Owner BOE TECH GRP CO LTD