High-sensitivity miniature electric field sensing device with cantilever beam structure

Abstract

The invention discloses a high-sensitivity micro electric field sensor device with a cantilever beam structure. The high-sensitivity micro electric field sensor device comprises a base, wherein a semiconductor film is installed on the base through a fixed part; an ion doping resistance area is embedded in the semiconductor film in a doped manner; and a piezoelectric film is deposited on the top surface of the semiconductor film. The high-sensitivity micro electric field sensor device has the beneficial effects that the electric field sensor has the application targets of high sensitivity, widedynamic range and wide frequency range. An ion doping area of the semiconductor film is large in response amplitude, and the device is high in sensitivity. Stable operation characteristic quantitiesof an electric power system are collected, failures and the characteristics of various overvoltages can be monitored, and accurate big data are provided for the researches such as power grid fault diagnosis and insulation coordination. The sensor is easy for micromation, high in integration level degree and low in cost, and is applicable for volume production, so that the sensor is applicable forintensive arrangement of large power grid circuits and electrical equipment so as to comprehensively collect electrical information and reflect the characteristics of the electric power system.

Description

technical field [0001] The invention relates to the field of novel electric field sensors in advanced manufacturing and automation, in particular to a highly sensitive miniature electric field sensor device with a cantilever beam structure. Background technique [0002] Smart grid has become a major research topic for global energy development and transformation. In order to meet the diverse energy structure, grid form, load type, user demand, etc. of the smart grid, the sensor network that realizes real-time monitoring of each node is of great significance to the reliable, safe, economical, and efficient operation of the grid. Sensor networks require a wide variety of sensors, including gas sensors, humidity sensors, temperature sensors, voltage sensors, current sensors, deformation sensors, and so on. Among them, as the most basic signal of the power grid, the measurement technology of voltage is still relatively backward. The existing voltage transformers are divided in...

AI Technical Summary

Problems solved by technology

At present, the electric field sensor of photoelectric effect is in the stage of promotion and test operation. So far, the problem of temperature stability is still difficult to solve, which has become the biggest challenge affecting the measurement accuracy of photoelectric sensors. In addition, photoelectric sensors cannot be miniaturized due to the demand for high-quality light sources. High cost, not conducive to wide application and development

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