A micro-laser outputting uniformly polarized light and its preparation method

Abstract

The invention relates to a miniature laser capable of outputting uniform polarized light and a preparation method thereof. The laser comprises a P-surface electrode, a P-surface distributed bragg reflector, an N-surface distributed bragg reflector, a substrate layer and an N-surface electrode, wherein metal grating of sub-wavelength is manufactured on the surface of the P-surface distributed braggreflector; the metal grating is connected with the P-surface electrode, and the period of the metal grating is smaller than the wavelength of a vertical cavity surface emitting laser; the surface ofthe substrate layer is a spherical surface; and a DOE layer is etched in one side, towards the N-surface electrode, of the substrate layer. According to the laser, a beam shaping system is not needed,and the flat top polarized light can be output by only needing process design and the using the device characteristics; and in addition, the laser has the advantages of simple structure, small and compact size, low manufacturing cost, and can be highly integrated in some equipment, and has very important application prospect.

Description

technical field

[0001] The invention belongs to the technical field of semiconductor lasers, in particular to a micro-laser outputting uniformly polarized light and a preparation method thereof. Background technique

[0002] Vertical cavity surface emitting laser (VCSEL) has all the advantages of semiconductor lasers, and also has the characteristics that ordinary semiconductor lasers do not have, such as small size, generally less than 1mm×1mm×0.5mm, long life, single longitudinal mode laser output, and laser spot shape Circular, easy to realize two-dimensional area array integration, etc. However, since VCSEL has a cylindrically symmetric waveguide structure, each transverse mode of the orthogonal polarization is double degenerate, so the polarization directions of the two orthogonally polarized lights may have arbitrary orientation angles, and the two polarization directions have no primary and secondary The characteristics of the transverse mode are exactly the same, so...

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