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A CVI process method for rapidly preparing carbon/carbon composite crucibles in batches

A carbon composite material and process method technology, which is applied to the growth of polycrystalline materials, chemical instruments and methods, self-melting liquid pulling method, etc. shell effect

Active Publication Date: 2021-03-02
上海康碳复合材料科技有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But this process has obvious disadvantages: preparation cycle, low deposition density, and a large number of pores inside

Method used

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  • A CVI process method for rapidly preparing carbon/carbon composite crucibles in batches
  • A CVI process method for rapidly preparing carbon/carbon composite crucibles in batches

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] A kind of CVI process method of rapidly preparing carbon / carbon composite crucible sides in batches, comprising the following steps:

[0027] 1) Furnace loading (such as figure 1 is the schematic diagram of the induction furnace and prefabricated body tooling of the present invention), the needle-punched laminated crucible side prefabricated body is loaded in the high-temperature vapor deposition furnace, the upper part of the deposition furnace is a preheating zone, and the lower part is a constant temperature zone. There are several layers of support plates, and each support plate is supported and separated by graphite columns. The prefabricated body of the crucible side is placed on the support plate, and the prefabricated body of the large size of the crucible side is set with the prefabricated body of the small size of the crucible side; from top to bottom, the second The prefabricated body of the crucible side of the first layer and the prefabricated body of the t...

Embodiment 2

[0035] A kind of CVI process method of rapidly preparing carbon / carbon composite crucible sides in batches, comprising the following steps:

[0036] 1) Furnace loading, the acupuncture laminated crucible side prefabricated body is loaded in a high-temperature vapor deposition furnace, the upper part of the deposition furnace is a preheating zone, and the lower part is a constant temperature zone, and the constant temperature zone is provided with several layers of support plates from bottom to top, Each support plate is supported and separated by graphite pillars, the crucible side prefabricated body is placed on the support plate, and a large size crucible side prefabricated body is fitted with a small size crucible side prefabricated body; from top to bottom, the second layer The prefabricated body of the crucible side and the prefabricated body of the third layer of the crucible side are connected with a gas supply pipeline. There is one gas supply pipeline for each layer, a...

Embodiment 3

[0043] A kind of CVI process method of rapidly preparing carbon / carbon composite crucible sides in batches, comprising the following steps:

[0044] 1) Furnace loading, the acupuncture laminated crucible side prefabricated body is loaded in a high-temperature vapor deposition furnace, the upper part of the deposition furnace is a preheating zone, and the lower part is a constant temperature zone, and the constant temperature zone is provided with several layers of support plates from bottom to top, Each support plate is supported and separated by graphite pillars, the crucible side prefabricated body is placed on the support plate, and a large size crucible side prefabricated body is set with a small size crucible side prefabricated body; from top to bottom, the second layer of crucible side The prefabricated body, the prefabricated body of the third layer of the crucible side and the prefabricated body of the fourth layer of the crucible side are connected with an air supply p...

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Abstract

The invention discloses a CVI process method for quickly preparing a carbon / carbon composite material crucible side in batches, which restricts the gas flow area through the suit of crucible side prefabricated bodies of different sizes, and reasonably sets the fluid flow route so that the gas is limited in a narrow space. Flow in the area while controlling its residence time in the narrow gap. The advantage of narrow slit flow is that during the pyrolytic carbon deposition process, the surface of the preform is not easy to crust, so that the preform of the crucible side can be deposited to a relatively high density at one time. When the hydrocarbon gas flows through the first layer of crucible from top to bottom When helping the prefabricated body, cracking and pyrolytic carbon deposition reactions occurred in a high-temperature environment. When the gas reached the second layer of the crucible preformed body, part of the precursor in the gas source had been consumed. The combination of consumed precursors, set-up and supplementary gas can greatly improve the efficiency of carbon / carbon composite crucible side preparation.

Description

technical field [0001] The invention relates to a CVI process method for rapidly preparing a carbon / carbon composite crucible side in batches. Background technique [0002] Currently, there are two main ways to prepare monocrystalline silicon: the Float zone method and the Czochralski method, and the monocrystalline silicon used in solar photovoltaic cells is prepared by the Czochralski method. The time node for photovoltaic grid parity is expected to come in 2020. The key to grid parity is to reduce production costs. It is a feasible way to increase the charging capacity of monocrystalline silicon Czochralski furnaces to reduce production costs, but graphite crucibles can no longer To meet the needs of monocrystalline silicon manufacturing enterprises, due to the low tensile strength and high brittleness of the graphite crucible side material, if it is made into an integral type, it will be difficult to process and relatively frequent replacement, resulting in high costs. T...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/83C04B35/622C30B15/10C30B29/06
CPCC04B35/622C04B35/83C04B2235/614C30B15/10C30B29/06
Inventor 邵忠贾林涛吴彪
Owner 上海康碳复合材料科技有限公司
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