A kind of nano connecting device
A connecting device and nanotechnology, applied in the field of processing and manufacturing, can solve the problems of reducing work efficiency, destroying positioning accuracy, pollutants, etc., achieving better operation flexibility, reducing moving distance, and saving equipment costs
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Embodiment 1
[0049] Nano attachment means, such as Figure 1 to 3 , It includes a vacuum chamber 101, near-field light generating means, operating means and control means nano 107, the near field light generating means includes a vacuum chamber and the laser emitting apparatus performs end, said operating means comprises a sample stage and performing nano-end operation means; operating means disposed on said nano the vacuum chamber interior 101, the operation execution side end and the said connection means performing the near field light generating means, said operation means, respectively said nano control means 107 is connected; the sample stage is adapted to move the sample, the apparatus performs an end operation is adapted to drive the movement of the end of execution.
[0050] Here, the surface of the sample is dispersed silicon nanoparticles and nanowires, in actual operation, is provided with a sample placed on the sample stage position, the wafer is placed on the sample placed at the ...
Embodiment 2
[0053] As described in the above embodiment, the present embodiment is that with a different place, such as Figure 1 to 4 , The near field light generating apparatus comprising: a laser emitting device, an optical fiber coupler 303 and ends execution, the laser emitting means is adapted to generate a laser beam, the optical fiber 304 and optical coupler 303 are connected by the end of the execution, the said optical fiber coupler 303 is adapted to couple the laser light into the optical fiber 304; end adapted to perform using the said laser beam generating near-field light.
[0054] Advantage of this arrangement is that the laser beam is coupled through a free space optical coupler 303 into the fiber 304, and then using the optical fiber 304 is connected to the end of execution, the optical fiber 304 by the laser beam transmitted to the end of the execution.
[0055] like Figure 1 to 4 Shown, the laser emitting means and said optical fiber coupler 303 to the vacuum chamber 101 pro...
Embodiment 3
[0059] As described in the above embodiment, the present embodiment is that with a different place, such as Figure 1 to 4 Shown, the laser emitting means includes a laser 301 and laser parameters amplifier 302, the laser 301 is adapted to emit said laser beam, said laser beam emitted by the laser 301 and amplifier 302 into the laser parameters, the laser amplifier 302 is adapted to said parameter controlled by said laser beam wavelength. Advantage of this is that, by setting the parameters of the laser amplifier 302, to control the wavelength of the laser beam.
[0060] Optionally, such as image 3 and Figure 4 Shown, the laser emitting apparatus further comprises a mirror 313, the mirror 315 reflects the laser beam of the laser mirror 313 and emission 301 appears as a set angle, the mirror 301 is adapted to the the laser beam emitted from the laser 301 is reflected to the laser amplifier 302 parameters. Advantage of this is that, by providing the reflecting mirror 313, the laser b...
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Abstract
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