High-sensitivity capacitive flexible tactile sensor based on three-dimensional porous microstructure composite dielectric layer and manufacturing method thereof
A tactile sensor, three-dimensional porous technology, which is applied in nanotechnology, instruments, and measuring devices for materials and surface science, and can solve problems such as poor stability, low sensitivity of flexible tactile sensors, and cumbersome preparation of composite dielectric layer microstructures. , to achieve the effects of improving sensitivity, easy regulation of electrical characteristics, and easy regulation of mechanical characteristics
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[0046] Example 1
[0047] Such as figure 1 As shown, this embodiment is a high-sensitivity capacitive flexible tactile sensor based on a three-dimensional porous microstructure composite medium layer. Its structure can be equivalent to a parallel plate capacitor with a synergistic effect between the plate spacing and the effective dielectric constant. It is a three-dimensional porous microstructure The upper and lower surfaces of the composite medium layer 4 are provided with a flexible isolation layer 3, a flexible electrode plate 2 and a flexible protective layer 1 in sequence. The schematic diagram of the split structure is as follows: figure 2 Shown. Among them: the flexible isolation layer 3 and the flexible protective layer 1 are made of PDMS, the flexible plate 2 is made of silicone conductive silver glue; the three-dimensional porous microstructure composite medium layer 4 is made of polyurethane sponge as a template and graphene / multi-wall Carbon nanotube / silicone rubbe...
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