Intelligent defect correction system an implementation method thereof
An intelligent, defective technology, applied in special data processing applications, electrical components, semiconductor/solid-state device manufacturing, etc., can solve problems such as product failure, inaccurate and real-time provision, and poor results
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0057]In semiconductor manufacturing plants, semiconductor packaging manufacturing plants, flat-panel display manufacturing plants, solar panel manufacturing plants, printed circuit manufacturing plants, photomask manufacturing plants, LED manufacturing or assembly plants, it is necessary to pass through photomasks, semiconductor lithography, etching, etc. and thin film deposition and other equipment and process methods to form products with specific functions; due to many complicated steps in the manufacturing process, control of process and equipment parameters, equipment parameter deviation, or technical bottlenecks all cause defects that affect product yield , the generation of these defects is inevitable. Therefore, during the manufacturing process of semiconductor factories, defect detection and analysis are performed to improve yield and reduce costs.
[0058] First, see figure 1 , is a schematic diagram of the operational structure of the intelligent defect correction...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap