Dual-light-source high-precision anti-interference large-working-distance self-collimating device and method based on absolute angle measurement
An absolute angle, dual light source technology, applied in the fields of precision measurement and optical engineering, to reduce the impact, improve the measurement accuracy, and improve the anti-interference ability.
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specific Embodiment 1
[0044] This embodiment is the first specific embodiment of a dual-light source high-precision anti-interference and large working distance autocollimation device based on absolute angle measurement.
[0045] The dual-light source high-precision anti-interference and large working distance self-collimation device based on absolute angle measurement in this embodiment, the structural diagram is as follows figure 2 shown.
[0046] The self-collimation device includes a light source unit 1, a first polarizer 6, a feedback imaging unit 4, a first transmissive collimator mirror 2, a combined mirror 5, a second polarizing beam splitter 7, and an angular drift feedback measurement unit 8 , and a wavefront distortion feedback measurement unit 9 .
[0047] The device includes a first light source 11 , a second light source 12 , a second dichroic mirror 14 , and a third dichroic mirror 55 . The first light source 11 and the second light source 12 respectively emit beams of different w...
specific Embodiment 2
[0072] This embodiment is the second specific embodiment of a dual-light source high-precision anti-interference and large working distance autocollimation device based on absolute angle measurement.
[0073] The dual-light source high-precision anti-interference and large working distance self-collimation device based on absolute angle measurement in this embodiment, the structural diagram is as follows Figure 4 shown. On the basis of the specific embodiment 1, the second transmissive collimator 82 , the fourth feedback beam splitter 92 , and the angle adjustment unit 93 are removed, and the third transmissive collimator 94 is added. The optical path structure of the disturbance feedback measurement unit is adjusted, the volume of the optical path and optical components is reduced, the overall structure is compact and stable, and it has more advantages of portability design. At the same time, the software algorithm replaces the mechanical adjustment and alignment link, impr...
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