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Method for improving quality factor of micro-resonator by using superposition of orthogonal mode, and realizing device thereof

A micro-resonator, quality factor technology, applied in impedance networks, electrical components, etc., can solve the problems of no reported quality factor, increase the complexity of the resonator system, disadvantageous device miniaturization and integration, etc. Long-life, easy-to-operate effects

Active Publication Date: 2019-04-26
SHANDONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the disadvantage of this solution is that two excitations must be applied to the resonator at the same time, which increases the complexity of the resonator system and is not conducive to the miniaturization and integration of devices.
[0005] Although the research on microresonators has been carried out since the 1990s, the research on the modal coupling of microresonators is an emerging research direction in recent years, and the research on modal coupling is generally in a vacuum There are few reports on the behavior of microresonator modal coupling in air, and there is no report on the method of using mode superposition to improve the quality factor

Method used

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  • Method for improving quality factor of micro-resonator by using superposition of orthogonal mode, and realizing device thereof
  • Method for improving quality factor of micro-resonator by using superposition of orthogonal mode, and realizing device thereof
  • Method for improving quality factor of micro-resonator by using superposition of orthogonal mode, and realizing device thereof

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Embodiment 1

[0057] A method for improving the quality factor of a microresonator by superposition of orthogonal modes, the microresonator comprising two cantilevers and a beam connecting the two cantilevers, comprising the following steps:

[0058] (1) Simultaneous excitation and measurement of the orthogonal mode: focus the modulated laser on the middle of the bridge of the microresonator, that is, a rectangular area with a length of 1.25 mm and a width of 0.2 mm in the middle of the beam, so that it vibrates and excites Two mutually perpendicular orthogonal modes of the resonator; the wavelength of the modulated pulse laser is 375nm; this wavelength is in the band with the maximum absorption rate of SUS304 stainless steel.

[0059] Modulated laser light is shone onto the bridges of the microresonators to excite them to vibrate. Laser irradiation on the surface of the microresonator creates a temperature gradient through its thickness and causes it to bend. When a sinusoidal signal is i...

Embodiment 2

[0079] A realization device of a method for improving the quality factor of a microresonator by using the superposition of orthogonal modes described in Embodiment 1, such as figure 1 As shown, it includes a computer 3, a data acquisition card 2, a lock-in amplifier 1, a laser vibrometer controller 4, a modulation laser 6, a laser vibrometer probe 5, an adjustable power continuous laser 7, and a continuous laser power controller 9;

[0080] Computer 3, data acquisition card 2, lock-in amplifier 1 are connected sequentially, lock-in amplifier 1, laser vibrometer controller 4, laser vibrometer probe 5 are connected sequentially, lock-in amplifier 1 is connected to modulated laser 6, continuous laser power control Device 9 is connected to adjustable power continuous laser 7;

[0081] During use, the modulation laser 6 is connected to the center of the bridge of the microresonator, the laser vibrometer probe 5 is aligned with a cantilever of the microresonator, and the adjustable ...

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Abstract

The invention relates to a method for improving quality factor of a micro-resonator by using superposition of orthogonal mode, and a realizing device thereof. The method comprises the steps of: (1) simultaneously stimulating and measuring the orthogonal mode: focusing a modulated pulse laser on a bridge connection part of the micro-resonator to vibrate the micro-resonator, so that two orthogonal modes of the resonator, which are vertical with each other, are stimulated; (2) adjusting the orthogonal modes to create superposition: radiating the micro-resonator by a continuous laser, so that theheat effect generated on a beam tunes a first-stage in-plane resonant mode of the micro-resonator to get close to the most close out-plane resonant mode of the micro-resonator until two resonant modesare superposed; and (3) measuring the vibration signal. Compared with the prior research, the method provided by the invention realizes the superposition of two orthogonal modes by using only one modulated sine excitation signal and one heating stationary laser, is simple, and is good in repeatability.

Description

technical field [0001] The invention relates to a method for improving the quality factor of a micro-resonator by superposition of orthogonal modes and a realization device thereof, belonging to the technical field of micro-electromechanical device sensors. Background technique [0002] Micro-nano mechanical resonator is a micro-nano mechanical structure based on the principle of resonance to realize energy flow transfer, conversion and evolution. -electromechanical system, MEMS / NEMS) has attracted much attention in the fields of mechatronics, aerospace, information communication, biomedicine, energy environment, industrial control, etc. It is a key and hot research direction in this field. Its Specific applications include quality detection of viruses, chemical sensing of volatile substances, measurement of Casimir forces, and collection of vibrational energy. [0003] In the working process of resonant devices, energy dissipation is the main factor affecting the overall p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H3/02H03H3/04
CPCH03H3/02H03H3/04H03H2003/027H03H2003/0414
Inventor 刘铎罗雯耀张冬冬赵超鹏
Owner SHANDONG UNIV
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