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A kind of tisiyn multi-component composite gradient tool coating and preparation method thereof

A gradient layer, multi-component technology, applied in coating, metal material coating process, vacuum evaporation coating and other directions, can solve the problems of reducing tool protection ability, aggravating tool wear process, material hardness reduction, etc. The effect of oxidation performance, improving bonding force and reducing the problem of internal stress increase

Active Publication Date: 2021-10-15
GUANGDONG UNIV OF TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the temperature is too high, it is easy to cause: 1) the softening of the tool matrix leads to a decrease in the hardness of the material, and some doping elements are precipitated; 2) the coating fails, which reduces the protection ability of the tool and aggravates the tool wear process; When active, it is easy to have an oxidation chemical reaction with the tool material or tool coating material

Method used

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  • A kind of tisiyn multi-component composite gradient tool coating and preparation method thereof
  • A kind of tisiyn multi-component composite gradient tool coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] S1) Perform glow cleaning and Cr ion bombardment: Ar gas is introduced into the gas, the vacuum degree of the furnace chamber is 0.5Pa, the negative bias voltage of the tool substrate 4 is 300V, and the glow cleaning time is 15min, and then the negative bias of the tool substrate 4 is adjusted. The bias voltage was set to 200V, the Cr target was turned on, the target current was adjusted to 200 A, and the tool substrate was bombarded with high-energy Cr ions for 4 hours and 5 minutes to activate the surface of the substrate;

[0035] S2) Preparation of CrN bonding layer 3: the target material is Cr, the gas is N2, the coating pressure is adjusted to 3Pa, the negative bias voltage applied to the tool substrate 4 is 200 V, and the target current is 400A;

[0036] S3) Prepare the TiSiN sub-coating of the TiSiN-TiSiYN gradient layer 2: the target materials are TiSi and Ti, the feeding gas is N2, the coating pressure is adjusted to 5Pa, the negative bias voltage of the tool s...

Embodiment 2

[0041] S1) Perform glow cleaning and Cr ion bombardment: Ar gas is introduced into the gas, the vacuum degree of the furnace chamber is 0.8Pa, the negative bias voltage applied to the tool base 4 is 200V, and the glow cleaning time is 10 minutes; then adjust the tool base 4 negative The bias voltage was set to 200V, the Cr target was turned on, the target current was adjusted to 200 A, and the tool substrate was bombarded with high-energy Cr ions for 4 hours and 10 minutes to activate the surface of the substrate;

[0042] S2) Prepare the CrN bonding layer 3: the target is Cr, the gas to be fed is N2, the coating pressure is adjusted to 5Pa, the negative bias voltage applied to the tool substrate 4 is 300 V, and the target current is 200A;

[0043] S3) Prepare the TiSiN sub-coating of the TiSiN-TiSiYN gradient layer 2: the target materials are TiSi and Ti, the feeding gas is N2, the coating pressure is adjusted to 4Pa, the negative bias voltage of the tool substrate 4 is adjust...

Embodiment 3

[0048] S1) Perform glow cleaning and Cr ion bombardment: Ar gas is introduced into the gas, the vacuum degree of the furnace chamber is 1Pa, the negative bias voltage applied to the tool base 4 is 200V, and the time for glow cleaning is 12 minutes: then adjust the negative bias of the tool base 4 Press to 200V, turn on the Cr target, adjust the target current to 200 A, and bombard the tool substrate with high energy Cr ions for 4 hours and 15 minutes to activate the surface of the substrate;

[0049] S2) Prepare the CrN bonding layer 3: the target is Cr, the gas is N2, the coating pressure is adjusted to 3Pa, the negative bias voltage applied to the tool substrate 4 is 250 V, and the target current is 200A;

[0050] S3) Prepare the TiSiN sub-coating of the TiSiN-TiSiYN gradient layer 2: the target materials are TiSi and Ti, the feeding gas is N2, the coating pressure is adjusted to 3Pa, the negative bias voltage of the tool substrate 4 is adjusted to 200V, and the arc source cu...

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Abstract

A TiSiYN multi-component composite gradient tool coating and a preparation method thereof, relating to the field of tool coatings, the tool includes a CrN bonding layer, a TiSiN-TiSiYN gradient layer, and a TiSiYN functional layer that are sequentially deposited on the surface of a tool substrate, and the CrN bonding layer The thickness of the layer is 0.1-1um; the TiSiN-TiSiYN gradient layer is a stacked structure with different Y content, and the Y content increases as the coating stack increases, and each stack includes a TiSiN sub-coating and a TiSiYN sub-coating layer, the thickness of each stack is 0.1-0.5um, the number of stacked layers is 1-5 layers, the thickness of the TiSiN-TiSiYN gradient layer is 0.1-2.5um; the thickness of the TiSiYN functional layer is 0.5-2um; the TiSiYN multi The total thickness of the component compound gradient tool coating is 1-5um. In the present invention, adding Y element to the TiSiN coating can improve the structure of the TiSiN coating, and effectively improve the bonding force and wear resistance of the coating.

Description

technical field [0001] The invention relates to the field of tool coatings, in particular to a TiSiYN multi-component composite gradient tool coating and a preparation method thereof. Background technique [0002] Coating a layer of hard coating on the tool surface by chemical vapor deposition (CVD) or physical vapor deposition (PVD) is an economical and practical way to improve the surface properties of materials. As an important branch of mechanical functional film, hard coating is widely used in machining tools, especially in metal cutting. Hard coating can improve the surface properties of materials, reduce friction and wear with workpieces, effectively improve the surface hardness, toughness, wear resistance and high temperature stability of materials, and greatly increase the service life of coated products. [0003] TiSiN coating has good chemical stability, high thermal hardness, good oxidation resistance, high film / substrate bonding force and excellent wear resista...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/32
Inventor 郑李娟郭光宇王成勇赖志伟杨简彰
Owner GUANGDONG UNIV OF TECH