A kind of tisiyn multi-component composite gradient tool coating and preparation method thereof
A gradient layer, multi-component technology, applied in coating, metal material coating process, vacuum evaporation coating and other directions, can solve the problems of reducing tool protection ability, aggravating tool wear process, material hardness reduction, etc. The effect of oxidation performance, improving bonding force and reducing the problem of internal stress increase
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Embodiment 1
[0034] S1) Perform glow cleaning and Cr ion bombardment: Ar gas is introduced into the gas, the vacuum degree of the furnace chamber is 0.5Pa, the negative bias voltage of the tool substrate 4 is 300V, and the glow cleaning time is 15min, and then the negative bias of the tool substrate 4 is adjusted. The bias voltage was set to 200V, the Cr target was turned on, the target current was adjusted to 200 A, and the tool substrate was bombarded with high-energy Cr ions for 4 hours and 5 minutes to activate the surface of the substrate;
[0035] S2) Preparation of CrN bonding layer 3: the target material is Cr, the gas is N2, the coating pressure is adjusted to 3Pa, the negative bias voltage applied to the tool substrate 4 is 200 V, and the target current is 400A;
[0036] S3) Prepare the TiSiN sub-coating of the TiSiN-TiSiYN gradient layer 2: the target materials are TiSi and Ti, the feeding gas is N2, the coating pressure is adjusted to 5Pa, the negative bias voltage of the tool s...
Embodiment 2
[0041] S1) Perform glow cleaning and Cr ion bombardment: Ar gas is introduced into the gas, the vacuum degree of the furnace chamber is 0.8Pa, the negative bias voltage applied to the tool base 4 is 200V, and the glow cleaning time is 10 minutes; then adjust the tool base 4 negative The bias voltage was set to 200V, the Cr target was turned on, the target current was adjusted to 200 A, and the tool substrate was bombarded with high-energy Cr ions for 4 hours and 10 minutes to activate the surface of the substrate;
[0042] S2) Prepare the CrN bonding layer 3: the target is Cr, the gas to be fed is N2, the coating pressure is adjusted to 5Pa, the negative bias voltage applied to the tool substrate 4 is 300 V, and the target current is 200A;
[0043] S3) Prepare the TiSiN sub-coating of the TiSiN-TiSiYN gradient layer 2: the target materials are TiSi and Ti, the feeding gas is N2, the coating pressure is adjusted to 4Pa, the negative bias voltage of the tool substrate 4 is adjust...
Embodiment 3
[0048] S1) Perform glow cleaning and Cr ion bombardment: Ar gas is introduced into the gas, the vacuum degree of the furnace chamber is 1Pa, the negative bias voltage applied to the tool base 4 is 200V, and the time for glow cleaning is 12 minutes: then adjust the negative bias of the tool base 4 Press to 200V, turn on the Cr target, adjust the target current to 200 A, and bombard the tool substrate with high energy Cr ions for 4 hours and 15 minutes to activate the surface of the substrate;
[0049] S2) Prepare the CrN bonding layer 3: the target is Cr, the gas is N2, the coating pressure is adjusted to 3Pa, the negative bias voltage applied to the tool substrate 4 is 250 V, and the target current is 200A;
[0050] S3) Prepare the TiSiN sub-coating of the TiSiN-TiSiYN gradient layer 2: the target materials are TiSi and Ti, the feeding gas is N2, the coating pressure is adjusted to 3Pa, the negative bias voltage of the tool substrate 4 is adjusted to 200V, and the arc source cu...
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