Ultrapure purification process and ultrapure purification system for nitrogen, argon and oxygen
An argon and oxygen technology, applied in the field of purification system, can solve the problems of prolonging the regeneration cycle of the adsorption process, consuming the adsorption capacity of the adsorption process, and shortening the regeneration cycle of the adsorption process, so as to reduce operating costs, avoid uneven flow rates, and reduce system costs Effect
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[0031] An ultra-pure purification system for nitrogen, argon, and oxygen, including a catalytic oxidation system, an adsorption system, and a control system; the catalytic oxidation process includes a catalytic reactor 3, a catalytic heater, an insulation heating jacket, a catalytic cooler 4, and heat exchange The device and the oxidation catalyst packed inside. The adsorption system includes two adsorption reactors, corresponding valves, corresponding pipelines, regeneration gas heater, regeneration gas cooler and control system; the adsorption reactor is filled with deoxidizer; the catalytic system and The feed gas inlet is connected, the catalytic system outlet is connected with the feed gas inlet of the adsorption system, and the adsorption system outlet is connected with the product gas outlet. The inlet of the adsorption reactor is connected to the inlet of the raw gas through a raw gas input pipeli...
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