Recovery of waste graphite crucibles and high-purity carbon powder

Abstract

The invention relates to a recovery method of waste graphite crucibles and high-purity carbon powder, and belongs to the field of semiconductor materials. The method includes crushing waste graphite crucibles, sieving the crushed crucibles, and performing acid washing, water washing and drying to obtain high-purity carbon powder. A problem of recovering the waste graphite crucibles is solved so that resources are more fully utilized, and the cost of the high-purity carbon powder is reduced. The method is low-carbon, environmentally friendly and energy-saving. The waste graphite crucibles are low in impurity content after a plurality of times of application at high temperature, and the prepared high-purity carbon powder is low in cost, high in purity, and wide in particle size distributionand can be used for preparing semiconductor-grade silicon carbide powder.

Description

Technical field

[0001] The application relates to the recycling of waste graphite crucibles and high-purity carbon powder, and belongs to the field of semiconductor materials. Background technique

[0002] As one of the most important third-generation semiconductor materials, silicon carbide single crystal is widely used in civil lighting and screens due to its wide band gap, strong resistance to voltage breakdown, high thermal conductivity, and high saturated electron migration rate. Display, aerospace, high-temperature radiation environment, petroleum exploration, radar communication and automotive electronics and other fields. Silicon carbide single crystals are usually prepared from silicon carbide powders by sublimation. Therefore, the purity, particle size, and crystal form of silicon carbide powders used in sublimation have significant effects on the quality of silicon carbide single crystals.

[0003] The most commonly used SiC powder synthesis method in production at pres...

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