Planar film structured infrared molecular fingerprint sensor and preparation method thereof
A molecular fingerprint and planar structure technology, applied in the direction of color/spectral characteristic measurement, etc., can solve the problems of complicated manufacturing process, high cost, device repeatability and controllability that limit large-scale application, etc., and achieve simple preparation process and low cost , The effect of small processing difficulty
Inactive Publication Date: 2019-05-24
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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[0004] In the existing technical solutions, molecular fingerprint sensors are generally composed of patterned metal or dielectric structures with micro-nano structures. The preparation process requires thin film patterning processing methods such as photolithography or electron beam etching, and the production process is complicated. , the cost is high, and the repeatability and controllability of the device limit the actual large-scale application
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[0026] The technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0027] Based on the planar thin film structure, the invention designs a non-patterned, highly sensitive molecular sensor. Specific designs such as Figure 1~4 shown. figure 1 It is a two-layer film planar structure sensor, which is composed of two layers of copper (Cu) and zinc selenide (ZnSe) on a silicon (Si) substrate. By setting the thickness of the ZnSe dielectric layer to a quarter wavelength or less It is ensured that the maximum value of the generated Fabry-Perot resonance field ...
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The invention discloses a planar film structured infrared molecular fingerprint sensor and a preparation method thereof. The infrared molecular fingerprint sensor comprises a two-layer film planar structured sensor and a single-film planar structured sensor. The two-layer film planar structured sensor consists of two films of Cu and ZnSe on a Si substrate, and the single-film planar structured sensor is formed by a gold film on a Si substrate. On the basis of film optical cavity resonance and interface field enhancement principles, the sensor is formed by planar multilayer metal and dielectricfilms, a graphical processing process is avoided, and the infrared molecular fingerprint sensor has advantages of simplicity in processing, low cost, high rate of finished products, large effective detection area, high monomolecular layer detection sensitivity and the like.
Description
technical field [0001] The invention belongs to the technical field of optical molecular sensors, and in particular relates to an infrared molecular fingerprint sensor with a planar film structure and a preparation method thereof. Background technique [0002] Optical molecular detection technology can quantitatively detect and analyze trace amounts of proteins, ribose, and nucleic acids. It is very important for humans to understand the essential issues of life such as gene structure, gene expression, and regulation. Fields such as formulation and disease monitoring have broad application prospects. Given that organic molecules and biomolecules are closely related to human life, environment and diseases, the innovation and application progress of molecular detection technology is directly related to human health and production methods, especially the level of new detection, diagnosis and treatment instruments. [0003] Common optical molecular sensors can be roughly divide...
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IPC IPC(8): G01N21/35
Inventor 刘志军郭世兴何德
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA